Embedded Waveguide Package Structure for Low-Loss RF Signals

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Solution Overview

Problem

Existing semiconductor device packages experience significant signal loss during the transmission of radio frequency signals due to inefficient waveguides, particularly at high frequencies.

Innovation Solution

Incorporation of a conductive lid within the substrate to define a waveguide that minimizes signal loss by restricting energy transmission in a specific direction, utilizing a cavity and conductive layers to guide electromagnetic waves efficiently.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If traditional signal transmission methods are used in semiconductor device packages, then the structure is simple, but signal loss is significant especially at high frequencies

Engineering Contradiction:
Improvesignal lossVSAvoidwaveguide structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The waveguide structure is nested within the substrate by forming a conductive lid that defines a cavity inside the substrate. The cavity is embedded within the substrate material, creating a nested configuration where the waveguide path is integrated into the package structure rather than being external or surface-mounted.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The waveguide transmission transitions from traditional planar or surface-level signal paths to a three-dimensional cavity structure. The conductive lid forms a enclosed volume within the substrate, utilizing the third dimension (depth) to create a waveguide path that guides electromagnetic waves through the cavity volume rather than along surface traces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If waveguide structure is implemented to reduce signal loss, then signal transmission efficiency improves, but manufacturing complexity increases

Engineering Contradiction:
Improvesignal transmission efficiencyVSAvoidwaveguide manufacturing ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The waveguide manufacturing process is merged with the existing substrate fabrication process. The conductive lid is formed using the same semiconductor manufacturing techniques already employed for creating the substrate, including depositing conductive layers and patterning. This integration allows the waveguide structure to be created alongside other package components in a unified manufacturing flow.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductive lid serves multiple functions simultaneously: it provides electromagnetic shielding, defines the waveguide cavity boundaries, and acts as part of the signal transmission path. This multi-functionality reduces the need for separate components and manufacturing steps, as the same structure performs multiple roles in both shielding and waveguide functionality.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The waveguide design achieves low signal loss transmission, especially for high-frequency signals, by maintaining consistent power distribution and minimizing energy loss across the signal path.

Implementation Method 1

The conductive lid defines a waveguide having a cavity. The waveguide is configured to transmit a signal from a first electronic component to a second electronic component through the cavity.

Methodology Applied
Scientific EffectWaveguide: Waveguide (optics)

Data Source

PatentUS20250372549A1Semiconductor device package
Publication Date: 2025.12.04 ADVANCED SEMICON ENG INC
  • US20250372549A1 patent drawing
  • US20250372549A1 patent drawing
  • US20250372549A1 patent drawing

AI summary

A semiconductor device package includes a substrate and a conductive lid. The conductive lid is disposed within the substrate. The conductive lid defines a waveguide having a cavity. The waveguide is configured to transmit a signal from a first electronic component to a second electronic component through the cavity.