Energy-Dependent Filter for X-ray Analysis Micro-Region Control
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Solution Overview
Problem
Existing X-ray fluorescence analysis methods struggle to irradiate only a small, specific region of a sample, leading to potential damage and inefficiency, particularly in the semiconductor industry where precise analysis is required.
Innovation Solution
An energy-dependent filter is placed in the optical path between the X-ray tube and the sample, selecting X-rays based on predetermined energy values to control the dimensions of the irradiated micro-region, combined with a capillary lens for focused X-ray beam generation and a detector for fluorescence detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional X-ray analysis methods are used without energy-dependent filtering, then the X-ray beam can penetrate the sample effectively, but the irradiated region becomes larger than desired and diffraction peaks interfere with analysis accuracy
Solution Approach 1:
The patent applies parameter changes by introducing an energy-dependent filter that selectively transmits X-rays based on their energy levels. This filter modifies the energy distribution of the X-ray beam, allowing only specific energy ranges to reach the sample, thereby controlling the irradiated region size and eliminating diffraction peaks that would otherwise interfere with analysis
Solution Approach 2:
The energy-dependent filter serves as an intermediary component placed between the X-ray source and the sample. This mediator selectively filters the X-ray beam by absorbing certain energy levels while transmitting others, thus controlling both the spatial dimensions of the irradiated region and the energy composition to eliminate harmful diffraction effects
2Object-affected harmful factors
If the X-ray beam is focused to a smaller micro-region, then surrounding electronics remain nonirradiated and damage risk is reduced, but the analysis reliability decreases due to diffraction peaks
Solution Approach 1:
By changing the energy parameters of the X-ray beam through selective filtering, the patent achieves precise spatial control of the irradiated micro-region. The energy-dependent filter ensures that only X-rays with appropriate energy levels reach the sample, maintaining a small irradiated area while simultaneously eliminating diffraction peaks that would compromise analysis reliability
Solution Approach 2:
The patent converts the potentially harmful effect of diffraction peaks into a benefit by using energy-dependent filtering to eliminate these peaks. The filter transforms the broad-spectrum X-ray beam into a selectively filtered beam that avoids the energy ranges producing diffraction, thereby turning a source of analysis error into a means of improving measurement accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for precise control of the irradiated region, minimizing damage and improving analysis reliability by eliminating diffraction peaks and optimizing the spot size, making it suitable for semiconductor analysis.
Implementation Method 1
selecting the energy-dependent filter (3) which is adapted to block in considerable measure X-rays with an energy which is equal to or lower than a predetermined energy value
Implementation Method 2
at least one capillary lens for focusing the X-rays in a micro-region at a location for a sample for analysis
Implementation Method 3
analysis of X-ray fluorescence originating from a relatively small irradiated region of a sample
Data Source
Figure 1
Figure 2A~2B
AI summary
The invention relates to a device for performing X-ray analysis. Device 1 comprises an X-ray tube 2 and at least one capillary lens 4 for focusing the X-rays in a micro-region at a location 5 for a sample for analysis. Device 1 further comprises a detector 6 for detecting X-ray fluorescence from the sample. Device 1 further comprises at least one energy-dependent filter 3 placed between the X-ray tube 2 and the capillary lens 4. The filter 3 is adapted to substantially block X-rays with an energy which is lower than a predetermined threshold value.