Electrostatic Chuck Detachable Shaft Design

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Solution Overview

Problem

Current electrostatic chucks (ESCs) for plasma processing chambers lack a detachable shaft design that supports both heat and cool applications, leading to increased costs and complex manufacturing processes, and do not allow for effective edge purge of substrates.

Innovation Solution

The design incorporates a detachable metal shaft coupled to a ceramic top plate with a bonding layer, enabling both heat and cool operations, and includes a bevel edge with an O-ring for bond protection, facilitating edge purge and reducing fabrication costs by eliminating high-temperature diffusion bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a traditional integrated ESC design is used, then manufacturing robustness is maintained, but manufacturing complexity and cost increase due to high-temperature diffusion bonding requirements

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidstructural integration complexity

Core Design Contradiction:

Ease of manufactureVSDevice complexity

Solution Approach 1:

The ESC is divided into separate modular components: a shaft assembly and a body assembly, which are coupled together through a coupling mechanism rather than requiring integrated high-temperature diffusion bonding. This segmentation allows each component to be manufactured independently using standard processes.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The design changes the bonding temperature parameter from high-temperature diffusion bonding to lower-temperature coupling methods, enabling the use of standard manufacturing processes instead of specialized high-temperature equipment while maintaining structural integrity.

Inventive Principle:

Principle #35Parameter changes

2Ease of manufacture

If a detachable shaft design is implemented, then cost and manufacturing complexity are reduced, but structural integrity and reliability may be compromised

Engineering Contradiction:

Improvemanufacturing cost and complexityVSAvoidstructural integrity

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The coupling mechanism incorporates preliminary alignment features and pre-assembled components that ensure proper positioning and structural integrity before final assembly. The shaft and body are designed with complementary coupling surfaces that maintain reliability upon assembly.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

A coupling mechanism acts as an intermediary between the shaft and body, providing a reliable connection that maintains structural integrity while allowing for detachable assembly. The coupling includes features such as coupling surfaces, fasteners, or interference fits that ensure robust joining.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Adaptability or versatility

If edge purge functionality is added, then substrate processing capability is improved, but device complexity and manufacturing difficulty increase

Engineering Contradiction:

Improvesubstrate processing capabilityVSAvoidedge purge structure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The shaft or body structure is designed to serve multiple functions: it provides mechanical support, electrical insulation, and incorporates edge purge functionality through integrated gas delivery channels or purging surfaces. This multi-functionality adds substrate processing capability without requiring entirely separate components.

Inventive Principle:

Principle #6Universality (Multi-functionality)

4Strength

If high-temperature diffusion bonding is used, then bond strength is achieved, but manufacturing cost and process complexity increase

Engineering Contradiction:

Improvebond strengthVSAvoidmanufacturing cost and process complexity

Core Design Contradiction:

StrengthVSEase of manufacture

Solution Approach 1:

The design accepts that the coupling interface may be less durable than permanent diffusion bonds, but this trade-off is acceptable given the significant reduction in manufacturing cost and complexity. The coupling mechanism is designed to provide sufficient strength for the application while allowing for easier assembly and disassembly.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The design replaces the thermal field-based diffusion bonding process with a mechanical coupling system that uses physical interfaces, fasteners, or interference fits to join components, eliminating the need for expensive high-temperature equipment and complex process control.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS20230162955A1Electrostatic chuck with detachable shaft

Publication Date: 2023.05.25 APPLIED MATERIALS INC

AI summary

Electrostatic chucks (ESCs) for plasma processing chambers, and methods of fabricating ESCs, are described. In an example, a substrate support assembly includes a cooling bottom plate, a ceramic top plate, and a bond layer between the ceramic top plate and the cooling bottom plate, the ceramic top plate in direct contact with the bond layer, and the bond layer in direct contact with the cooling bottom plate. A detachable shaft is coupled to the cooling bottom plate by a plurality of bolts at a side of the cooling bottom plate opposite the bond layer.