Electrostatic Chuck Surface Anomaly Detection by Temperature Change
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Solution Overview
Problem
The surface state of an electrostatic chuck (ESC) in semiconductor manufacturing devices deteriorates due to damage and deposition, leading to anomalies in processing speed and wafer adsorption, which are difficult to detect in real-time due to the lack of associated sensors, and existing methods like temperature sensor data analysis are ineffective as temperature values are controlled in etching devices.
Innovation Solution
A diagnostic device that collects temperature data before and after energy changes in a semiconductor manufacturing device, calculates temperature change features, and determines anomalies based on these features to assess the ESC's surface state, allowing for predictive maintenance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If temperature sensor data is used to detect thermal conductivity changes, then detection capability is improved, but the method becomes ineffective because temperature values are controlled constant by the temperature control system in etching devices
Solution Approach 1:
The patent changes the detection parameter from temperature values (which are controlled constant) to temperature change rates (derivatives of temperature with respect to time). By detecting how quickly temperature changes rather than the temperature itself, the system can identify thermal conductivity changes even when the temperature control system maintains constant temperature values. This parameter transformation resolves the contradiction by making the detection method effective despite the controlled temperature conditions.
2Measurement precision
If real-time monitoring of ESC surface state is implemented, then anomaly detection capability is improved, but device complexity increases due to lack of associated sensors
Solution Approach 1:
The patent makes the existing temperature control system serve a dual function: not only controlling temperature but also providing data for anomaly detection. The temperature sensor already present in the system is utilized to detect thermal conductivity changes through analyzing temperature change rates during energy application. This self-service approach enables real-time monitoring without adding specialized sensors, thereby improving anomaly detection capability while avoiding increased device complexity.
Solution Approach 2:
The patent enables the temperature control system and existing temperature sensors to perform multiple functions: temperature control and anomaly detection. By analyzing the temperature change data already collected for control purposes, the system simultaneously detects thermal conductivity changes of the ESC surface. This multi-functionality approach resolves the contradiction by achieving real-time monitoring without requiring additional dedicated sensors.
3Stability of the object's composition
If temperature control system maintains constant temperature, then processing stability is improved, but the ability to detect thermal conductivity changes is lost
Solution Approach 1:
The patent applies periodic energy to the electrostatic chuck in controlled cycles, allowing the system to observe temperature changes during these periodic energy applications. By analyzing the temperature response during these periodic energy inputs, the system can detect thermal conductivity changes while the temperature control system maintains overall constant temperature between cycles. This periodic action approach resolves the contradiction by enabling detection during controlled energy pulses while maintaining processing stability during normal operation.
Solution Approach 2:
The patent introduces dynamic energy application to the electrostatic chuck, temporarily varying the energy input to provoke temperature changes that reveal thermal conductivity properties. During these dynamic energy application periods, the system measures temperature change rates to detect anomalies. The temperature control system then restores constant temperature conditions. This dynamic approach allows thermal conductivity detection while maintaining processing stability, resolving the contradiction between the two requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the accuracy of detecting anomalies in the ESC's surface state, enabling timely maintenance and preventing processing issues.
Implementation Method 1
a sample electrostatically adsorbed to a film is mounted on a sample stage
Implementation Method 2
temperature data before and after a change of energy applied to the sample is obtained
Data Source
AI summary
An object of the present disclosure is to provide a technique for detecting an anomaly of the surface state of the film of an electrostatic chuck. In a diagnostic device for diagnosing the state of a semiconductor manufacturing device having a sample stage on which a sample electrostatically adsorbed to a film is mounted, temperature data before and after a change of energy applied to the sample is obtained, and an anomaly of the film is detected on the basis of the obtained temperature data.