EUV Camera Positioning via Travel Conversion in Mask Inspection
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Solution Overview
Problem
Adjusting the imaging beam path between a photomask and an EUV camera in a mask inspection device is challenging due to the need for precise positioning of the EUV camera relative to the vacuum housing, which is complicated by the high forces required to overcome the weight and pressure differences.
Innovation Solution
A conversion member is arranged between the EUV camera and the vacuum housing, converting a larger actuation travel of an actuator into a smaller adjusting travel of the EUV camera, allowing for precise positioning using smaller actuators and hydraulic or mechanical mechanisms to manage these forces.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the EUV camera is mounted directly on the vacuum housing, then the structure is simple, but the adjustment precision is insufficient due to the need for large actuation travel to overcome weight and pressure differences
Solution Approach 1:
A conversion member is introduced as an intermediary between the actuator and the EUV camera. This conversion member transforms the actuation travel into a reduced adjusting travel, enabling precise positioning of the EUV camera while using a compact actuator that does not need to directly overcome the full weight and pressure differential forces.
2Length of moving object
If a large actuation travel is used to adjust the EUV camera position, then the adjustment range is sufficient, but the actuator dimensions become large
Solution Approach 1:
The conversion member acts as a mechanical intermediary that reduces the actuation travel required from the actuator. By converting a small actuation travel into a larger adjusting travel of the EUV camera, the system achieves sufficient adjustment range while keeping the actuator dimensions compact.
Solution Approach 2:
The conversion member employs a lever mechanism that operates in a different dimensional space, transforming linear actuation travel into amplified camera position adjustment. This dimensional transformation allows the system to achieve large adjustment ranges without requiring proportionally large actuators.
3Force
If the actuator directly moves the EUV camera, then the mechanism is simple, but the forces required are too high for small actuators
Solution Approach 1:
The conversion member serves as a force transmission intermediary between the actuator and the EUV camera. It enables small actuators to generate the necessary forces for camera positioning by converting actuation force through mechanical leverage, avoiding the need for large, high-force actuators.
Solution Approach 2:
The conversion member introduces dynamic force transformation through its lever mechanism. The system dynamically adapts the force transmission ratio based on the positioning requirements, allowing small actuators to effectively control the much heavier EUV camera by optimizing force application during the adjustment process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and precise adjustment of the EUV camera's position relative to the vacuum housing, facilitating high-quality imaging of the photomask without contamination, even under high vacuum conditions.
Implementation Method 1
The conversion member can be a hydraulic conversion member. The conversion member can have an interior filled with a hydraulic liquid. The interior can be delimited by an input piston and an output piston, such that a movement of the input piston along an actuation travel is transformed into a movement of the output piston
Data Source
AI summary
A mask inspection device, comprising a vacuum housing, an EUV camera and, arranged in the interior of the vacuum housing, a projection lens for imaging at least one portion of an EUV photomask onto an image sensor of the EUV camera. The EUV camera is mounted on the vacuum housing. The mask inspection device comprises an actuator for adjusting the position of the EUV camera, wherein the actuator acts on a conversion member arranged between the vacuum housing and the EUV camera. The conversion member converts an actuation travel of the actuator into an adjusting travel of the EUV camera, wherein the actuation travel is longer than the adjusting travel. The invention also relates to a method for adjusting a mask inspection device.