EUV Pod Inspection with Line and Area Scan Defect Detection
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Solution Overview
Problem
EUV pods used for storing and transporting reticles in semiconductor manufacturing are prone to contamination due to abrasion during relative movement, necessitating regular inspection for defects and contamination, which existing methods are inefficient and prone to premature component discard.
Innovation Solution
A method and system using line and area scan cameras with darkfield and bright light imaging, combined with 3- or 4-axis tables, to inspect inner and outer EUV pod components simultaneously, ensuring precise positioning and enhanced detection of defects and contamination, and a handling system to manage EUV pods in an inspection station.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If regular inspection of EUV pod components is performed using existing methods, then contamination and defects can be detected, but inspection efficiency is low and components may be discarded prematurely
Solution Approach 1:
The inspection system is divided into multiple specialized detection units, each equipped with specific imaging modes (darkfield, brightfield, oblique illumination) to detect different types of defects. This segmentation allows parallel inspection of multiple components simultaneously, improving throughput while maintaining high detection accuracy for various defect types
Solution Approach 2:
Multiple detection units with different imaging capabilities are combined into a single integrated inspection system. This merging enables simultaneous inspection of multiple EUV pod components using different illumination and detection methods, achieving both high productivity and comprehensive defect detection without requiring multiple separate inspection stations
2Reliability
If multiple detection units are used to inspect EUV pod components, then inspection coverage is improved, but comparability of inspection data across different units becomes difficult
Solution Approach 1:
A standardized reference object with known defect patterns is used across all detection units. Each unit captures images of this reference object to establish a common reference frame and calibration standard. This universal reference enables accurate comparison of inspection data across different detection units, ensuring data comparability while maintaining comprehensive inspection coverage
Solution Approach 2:
The system uses the reference object to provide feedback for calibrating and aligning each detection unit. By comparing actual inspection data against the known reference patterns, the system automatically adjusts and validates the performance of each detection unit, ensuring consistent and comparable measurements across the entire inspection system
3Reliability
If EUV pod components are inspected frequently to ensure cleanliness, then contamination can be detected early, but inspection time and resource consumption increase
Solution Approach 1:
The inspection system operates continuously with multiple detection units inspecting multiple components in parallel. This continuous parallel operation maintains high detection reliability for contamination while minimizing the time lost to inspection, as the system can inspect numerous components simultaneously rather than sequentially
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Provides reliable and high-throughput inspection of EUV pod components, minimizing abrasion and contamination, enabling accurate monitoring and reducing unnecessary component discard by enhancing comparability of inspection data across different detection units.
Implementation Method 1
The line scan camera and the area scan camera are used to acquire inspection data of the inner pod and/or outer pod of the EUV pod
Data Source
AI summary
Method for inspection of an inner pod EIP and/or an outer pod EOP of an EUV pod, respectively including a base member and a cover member. The method includes acquiring inspection data sets using a line scan camera and an area scan camera, inspecting the cover member in a first inspection unit using the line scan camera, inspecting the base member in a second inspection unit using the area scan camera, inspecting the cover member in the second inspection unit using the area scan camera, and inspecting the base member in the first inspection unit using the line scan camera.