EUV Polarimeter With Brewster-Angle Mirrors for Single-Pulse Analysis

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing polarimeters for measuring electromagnetic radiation polarization in the EUV band are limited by high cost, complexity, and slow operation, requiring multiple measurements over extended periods, and are not economically viable for efficient single-pulse polarization analysis.

Innovation Solution

A polarimeter design using two mirrors positioned at Brewster's angle with orthogonal planes of incidence, dividing radiation into orthogonal polarization components, and employing high-sensitivity detectors for simultaneous detection and processing to determine polarization angle and degree in a single pulse.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If existing polarimeters use multiple measurements over extended periods, then measurement accuracy can be improved, but measurement time and productivity deteriorate

Engineering Contradiction:

Improvepolarization measurement accuracyVSAvoidmeasurement speed

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The incident radiation is divided into two separate beams by a beam splitter, with each beam directed to a different detector. This segmentation allows simultaneous measurement of orthogonal polarization components, enabling single-pulse polarization analysis without requiring multiple sequential measurements, thus resolving the contradiction between measurement accuracy and speed

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The optical system is pre-configured with beam splitters and detectors positioned to simultaneously receive orthogonal polarization components. This preliminary arrangement eliminates the need for mechanical rotations or sequential adjustments during measurement, allowing immediate single-pulse polarization determination while maintaining high accuracy

Inventive Principle:

Principle #10Preliminary action

2Adaptability or versatility

If existing polarimeters use complex mechanical adjustment systems, then measurement flexibility is improved, but device complexity and cost worsen

Engineering Contradiction:

Improvemeasurement flexibilityVSAvoidmechanical adjustment complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention replaces mechanical rotation systems with a fixed optical configuration using beam splitters and stationary detectors. The polarization measurement is achieved through optical path division rather than mechanical scanning, eliminating complex mechanical adjustments while maintaining measurement versatility through the fixed orthogonal detection geometry

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The fixed optical configuration with orthogonal beam splitting provides universal polarization measurement capability for various EUV radiation sources. The system can measure linear polarization at any angle by rotating the entire apparatus or adjusting the input polarization, eliminating the need for complex mechanical adjustment mechanisms while maintaining adaptability

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Measurement precision

If existing polarimeters use expensive detectors and optics, then measurement sensitivity is improved, but cost worsens

Engineering Contradiction:

Improvepolarization detection sensitivityVSAvoidsystem cost

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

By dividing the incident radiation into two equal-intensity beams using a beam splitter, the system maximizes the use of available photons at each detector. This segmentation strategy allows the use of simpler, less expensive detectors that do not require extreme sensitivity, as each detector receives sufficient signal intensity from the divided beam, thereby reducing overall system cost while maintaining measurement precision

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid, cost-effective measurement of electromagnetic field polarization with high sensitivity and accuracy, reducing the need for mechanical adjustments beyond initial alignment, and allowing efficient single-pulse analysis.

Implementation Method 1

two mirrors (11, 12) positioned, with respect to an axis of a radiation incident to them and to a normal vector to a reflecting surface, in correspondence with Brewster's angle

Methodology Applied

Scientific EffectBrewster's angle: Brewster's Angle

Implementation Method 2

one part of which is reflected and the other transmitted toward the second mirror (12)

Methodology Applied

Scientific EffectReflection: Reflection

Data Source

PatentUS12352628B2Apparatus for measuring the polarization of an electromagnetic radiation and corresponding method of use

Publication Date: 2025.07.08 ELETTRA SINCROTRONE TRIESTE S C P A

AI summary

The invention concerns an apparatus (50) for measuring the polarization of an electromagnetic radiation (100) in the Extreme Ultraviolet, comprising a source (200) of said radiation (100) and a polarimeter (10) on which said radiation (100) is incident. The polarimeter (10) can be configured at least to detect the polarization angle of the radiation (100) and, possibly, to calculate the degree of polarization. The invention also concerns a method for using said apparatus (50).