EUV Surface Ionizer for Trace Detection

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Solution Overview

Problem

Conventional trace detection systems require a desorber and separate ionization step, limiting throughput, scalability, and compatibility with thermally sensitive surfaces, and often result in ozone formation and bulky equipment.

Innovation Solution

A surface ionizer using an extreme ultraviolet (EUV) radiation source to disrupt and ionize surface residues directly, eliminating the need for a desorber and enabling miniaturization, rapid cycle times, and low power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional thermal evaporation and separate ionization steps are used, then residues can be transferred to gas phase for analysis, but the equipment becomes bulky and throughput is limited

Engineering Contradiction:

ImprovethroughputVSAvoidequipment size

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent combines the evaporation and ionization functions into a single integrated source that uses extreme ultraviolet (EUV) radiation to simultaneously vaporize residues from the surface and ionize the vaporized molecules. This eliminates the need for separate thermal evaporation chamber and ionization chamber, reducing equipment size and increasing throughput by allowing continuous operation without transferring samples between different stages.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces the mechanical/thermal system (heating elements, separate ionization sources) with an electromagnetic radiation-based system. EUV radiation directly provides both the energy for vaporization and the photons for photoionization, eliminating complex mechanical heating systems and separate ionization apparatus, thereby reducing equipment complexity and size.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If thermal energy is used to evaporate analyte from surface, then residues can be vaporized for detection, but compatibility with thermally sensitive surfaces is limited

Engineering Contradiction:

Improvecompatibility with thermally sensitive surfacesVSAvoidevaporation temperature

Core Design Contradiction:

Adaptability or versatilityVSTemperature

Solution Approach 1:

The patent changes the energy delivery parameter from thermal conduction/heating to direct electromagnetic radiation absorption. EUV photons are absorbed by the analyte molecules directly, causing rapid vaporization without significant heat transfer to the substrate. This allows analysis of thermally sensitive surfaces and materials that would decompose or be damaged by conventional heating methods.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The patent substitutes thermal conduction-based evaporation with photon-based direct vaporization. Instead of using heating elements that conduct heat to the sample, EUV radiation directly energizes the analyte molecules, causing them to vaporize without significant thermal impact on the underlying surface, thereby protecting thermally sensitive substrates.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If AC or DC plasma sources are used for ionization, then ions can be generated for spectrometric analysis, but electrode erosion and ozone generation occur

Engineering Contradiction:

Improveionization efficiencyVSAvoidelectrode erosion and ozone generation

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent replaces plasma-based ionization (which requires electrodes and generates harmful byproducts) with photoionization using EUV photons. The electromagnetic radiation directly ionizes vaporized analyte molecules through photon absorption, eliminating the need for plasma discharge, electrodes, and associated harmful effects like electrode erosion and ozone generation, while maintaining reliable ionization efficiency.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The EUV radiation source increases ion concentration, covers a wide range of substrate materials, and reduces equipment size, improving detection efficiency and compatibility while avoiding ozone formation.

Implementation Method 1

extreme ultraviolet (EUV) radiation source to disrupt and ionize surface residues directly

Methodology Applied

Scientific EffectPhotoionization: Photoionisation

Implementation Method 2

The radiation source is configured to emit a band of electromagnetic radiation having a wavelength distribution between 10 nanometers and 124 nanometers

Methodology Applied

Scientific EffectElectromagnetic radiation absorption: Absorption (EM radiation)

Data Source

PatentUS10665446B2Surface layer disruption and ionization utilizing an extreme ultraviolet radiation source

Publication Date: 2020.05.26 RAPISCAN SYST INC (US)

AI summary

A surface ionizer for a trace detection system includes an extreme ultraviolet light source and an ion transfer line. Activation of the extreme ultraviolet light disrupts a surface of a sample along with residue and ionizes the resulting vapor. The ionized vapor is collected in the ion transfer line and passed into an analysis device for detection of components in the vapor.