EUV Target Supply Device Feedback Control for Droplet Stability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current EUV light generation systems for semiconductor production face challenges in generating stable EUV light with feature sizes below 32 nm, as existing target supply devices struggle to consistently produce target material droplets at stable intervals, affecting the reliability and efficiency of EUV light generation.
Innovation Solution
A target supply device is developed, incorporating a reservoir for holding target material in liquid form, a vibrating element to apply vibrations, a target sensor to detect droplets, a control unit to set parameters, and a power source to apply driving voltage based on detected parameters, ensuring stable droplet generation through feedback control mechanisms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional target supply device is used to supply target material droplets, then the device structure is simple, but the droplet generation stability and interval consistency are poor
Solution Approach 1:
The patent implements a feedback control system where a detection device monitors the actual droplet generation interval and feeds this information back to a control device. The control device adjusts the vibration frequency of the vibration generation device based on the detected interval, creating a closed-loop system that maintains stable droplet generation despite variations in operating conditions
Solution Approach 2:
The patent uses a vibration generation device to apply mechanical vibrations to the target material supply system, causing controlled droplet ejection. By precisely controlling the vibration frequency through the feedback mechanism, the system achieves consistent droplet generation intervals and improved reliability
2Manufacturing precision
If the vibration frequency is not precisely controlled, then the device operation is simple, but the droplet generation interval is unstable
Solution Approach 1:
The detection device continuously monitors the droplet generation interval and provides real-time feedback to the control device. This feedback mechanism enables precise adjustment of the vibration frequency to maintain consistent droplet generation intervals, achieving high manufacturing precision through automated closed-loop control
Solution Approach 2:
The system dynamically adjusts the vibration frequency parameter based on feedback from the detection device. By changing the frequency parameter in response to detected variations in droplet generation interval, the system maintains precise control over droplet ejection timing and improves interval consistency
3Reliability
If manual parameter adjustment is used, then the control system is simple, but the droplet generation consistency is poor
Solution Approach 1:
The system replaces manual parameter adjustment with an automated feedback control mechanism. The detection device monitors droplet generation intervals and automatically signals the control device to adjust vibration frequency, eliminating manual intervention and achieving consistent droplet generation through automated closed-loop control
Solution Approach 2:
The control system performs self-adjustment based on feedback from the detection device, without requiring external manual intervention. The system automatically detects variations in droplet generation and corrects them by adjusting vibration frequency, enabling the device to maintain consistent performance through self-service control
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables the generation of stable EUV light by ensuring consistent and uniform target material droplet formation, improving the reliability and efficiency of EUV light generation systems for semiconductor production with feature sizes below 32 nm.
Implementation Method 1
a vibrating element to apply vibrations to the reservoir
Implementation Method 2
The vibrating element may include a piezoelectric element
Data Source
AI summary
A target supply device may include a reservoir configured to hold a target material in its interior in liquid form, a vibrating element configured to apply vibrations to the reservoir, a target sensor configured to detect droplets of the target material outputted from the reservoir, a control unit configured to set parameters based on a result of the detection performed by the target sensor, a function generator configured to generate an electrical signal having a waveform based on the parameters, and a power source configured to apply a driving voltage to the vibrating element in accordance with the electrical signal.