Evaporation Plume Separation for Dopant Gradient Control
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Solution Overview
Problem
Existing methods for depositing layers in organic electroluminescence and photovoltaic devices struggle to achieve precise and adjustable high concentrations of dopants, with prior art methods resulting in homogeneous but not necessarily optimal composition profiles.
Innovation Solution
The method involves arranging evaporation plumes from multiple sources such that their maxima are separated within the coating area, allowing for precise control of the composition by tilting and adjusting the distance of the evaporation sources, enabling a gradual variation of component concentrations perpendicular to the substrate plane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If evaporation plumes from multiple sources are arranged with separated maxima within the coating area, then the precision of dopant concentration control is improved, but the complexity of the deposition apparatus increases
Solution Approach 1:
The patent applies local quality by creating distinct spatial zones within the coating area where different evaporation sources dominate. By arranging evaporation plumes with separated maxima, each region of the substrate receives a controlled mixture ratio of dopant and organic material, enabling precise local composition control without requiring complex global adjustment mechanisms.
Solution Approach 2:
The patent utilizes the spatial dimension by arranging evaporation sources at different positions and orientations to create separated plume maxima. This dimensional arrangement allows independent control of composition profiles across the substrate surface, achieving precise dopant concentration control through geometric configuration rather than complex temporal or compositional adjustments.
2Adaptability or versatility
If evaporation sources are tilted to achieve gradual variation of component concentrations, then the adaptability of composition profiling is improved, but the difficulty of apparatus operation increases
Solution Approach 1:
The patent implements dynamics by making the evaporation sources tiltable and adjustable in position. This allows the composition profile to be dynamically adapted to different device requirements by changing the geometric configuration of the evaporation sources during setup, while the actual deposition process proceeds with stable, predetermined parameters.
Solution Approach 2:
The patent applies preliminary action by pre-configuring the evaporation sources with specific tilt angles and positions before deposition begins. This preliminary geometric arrangement establishes the desired composition gradient profile in advance, simplifying the operation during actual deposition as no real-time complex adjustments are needed.
3Manufacturing precision
If multiple evaporation sources are used with separated plume maxima, then the purity of dopant distribution is improved, but the time required for deposition increases
Solution Approach 1:
The patent applies segmentation by dividing the coating area into distinct zones dominated by different evaporation sources. This segmentation of the deposition process into spatially separated regions with controlled plume overlap enables precise dopant distribution through simultaneous multi-source deposition, avoiding the need for sequential deposition that would increase time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise and adjustable dopant concentrations in organic layers, enhancing the composition profile and achieving desired gradients, particularly beneficial for inline coating processes and organic light emitting diodes or photovoltaic devices.
Implementation Method 1
two or more materials are deposited by a vacuum evaporation
Data Source
AI summary
The present invention refers to a method as well as an apparatus for depositing a layer at a substrate, the layer containing at least two components co-deposited by at least two evaporation sources, wherein the mixture of the components regarding the content of the components is set by tilting the evaporation sources to predetermined angle and/or by positioning the evaporation sources at a predetermined distance with respect to the substrate and/or wherein evaporation plumes of the evaporation sources are arranged such that the maxima of the evaporation plumes are separated locally with respect to the substrate.