Exposed Gyro Element Packaging for Inertial Sensor Accuracy
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Solution Overview
Problem
Existing inertial sensor modules face challenges in increasing the angular velocity detection accuracy of vibrating gyro sensor elements due to their packaging, which restricts their size and hinders further improvements.
Innovation Solution
The inertial sensor design includes a package with a housing space containing a sensor unit comprising a first acceleration sensor element and a first angular velocity sensor element, a second angular velocity sensor element exposed in the housing space, and a circuit element electrically coupled to these sensors, with a hermetically sealed vacuum environment to enhance vibration characteristics and increase the size of the angular velocity sensor element.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the vibrating gyro sensor element is housed in a package, then the device structure is compact and protected, but the size of the sensor element is reduced and detection accuracy deteriorates
Solution Approach 1:
The inertial sensor is divided into two separate packages: a first package housing the acceleration sensor and first angular velocity sensor, and a second package housing the second angular velocity sensor (vibrating gyro). This segmentation allows the vibrating gyro sensor element to be larger since it is not constrained by the compact first package, thereby improving angular velocity detection accuracy while maintaining overall device compactness through modular architecture.
Solution Approach 2:
The patent transitions from a single-package three-dimensional constraint to a multi-package spatial arrangement. The second angular velocity sensor is placed in a separate second package, effectively utilizing spatial distribution across different dimensions. This allows the vibrating gyro sensor element to achieve a larger size in the second package while the first package remains compact, resolving the contradiction between size and detection accuracy.
2Measurement precision
If the vibrating gyro sensor element size is increased, then angular velocity detection accuracy is improved, but the package size must be increased
Solution Approach 1:
The inertial sensor system is segmented into two independent packages: the first package contains the acceleration sensor and first angular velocity sensor, while the second package contains the second angular velocity sensor (vibrating gyro). This segmentation allows the second package to be sized appropriately for the larger vibrating gyro sensor element needed for high accuracy, while the first package remains compact, thus resolving the contradiction between sensor accuracy and overall package size through functional separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for higher angular velocity detection accuracy by exposing the angular velocity sensor element, enabling larger size and improved vibration characteristics, resulting in enhanced detection precision and robustness.
Implementation Method 1
a second angular velocity sensor element disposed in the housing space in an exposed state
Implementation Method 2
a hermetically sealed vacuum environment to enhance vibration characteristics
Data Source
AI summary
An inertial sensor includes a package having a housing space, a sensor unit disposed in the housing space and including a first acceleration sensor element and a first angular velocity sensor element, a second angular velocity sensor element disposed in the housing space in an exposed state and having a same angular velocity detection axis as that of the first angular velocity sensor element, and a circuit element disposed in the housing space and electrically coupled to the sensor unit and the second angular velocity sensor element.