Fabry-Perot Optical Filter With Electrode Resistance Sensing
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Solution Overview
Problem
Existing Fabry-Perot interference filters face challenges in maintaining high wavelength accuracy due to environmental temperature changes, requiring additional space for temperature sensors and wiring, which hinders size reduction.
Innovation Solution
An optical filter device incorporating a Fabry-Perot interference filter with a resistance measurement unit that measures the resistance value of a driving electrode near the air gap to accurately grasp temperature changes, eliminating the need for external temperature sensors and wiring, thereby allowing for downsizing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a temperature sensor and wiring are provided to measure temperature for wavelength accuracy, then wavelength accuracy is improved, but device size increases
Solution Approach 1:
The patent merges the temperature sensing function with the existing driving electrode by utilizing its resistance temperature characteristics. The driving electrode serves dual purposes: actuating the mirror and sensing temperature through resistance measurement, thereby eliminating the need for separate temperature sensors and wiring while maintaining wavelength accuracy
Solution Approach 2:
The driving electrode is given multiple functions: it acts as both the actuator for adjusting the air gap distance and as the temperature sensor. By measuring the resistance value of this single component, the system obtains temperature information without adding extra elements, thus reducing device size while preserving measurement precision
2Measurement precision
If the driving electrode is positioned close to the air gap for accurate temperature measurement, then temperature measurement accuracy is improved, but the risk of electrical discharge increases
Solution Approach 1:
The patent applies different properties to different regions: the driving electrode is positioned close to the air gap for accurate temperature sensing, while a ground electrode is positioned near the driving electrode to provide electrical shielding. This local differentiation allows the system to achieve accurate measurement without incurring harmful electrical discharge
Solution Approach 2:
The ground electrode acts as an intermediary element between the driving electrode and the air gap. It provides electrical shielding to prevent discharge while allowing the driving electrode to remain positioned close to the air gap for accurate temperature measurement, thus mediating between measurement accuracy and safety requirements
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Accurate temperature measurement of the Fabry-Perot interference filter is achieved without external sensors, ensuring high wavelength accuracy and reducing the device's size.
Implementation Method 1
the resistance value of the first driving electrode changes in accordance with the temperature, the temperature of the Fabry-Perot interference filter can be grasped based on the measured resistance value
Implementation Method 2
the distance between the mirror portions is adjusted by an electrostatic force corresponding to an applied voltage
Implementation Method 3
a Fabry-Perot interference filter including a pair of structural bodies facing each other via an air gap and a pair of mirror portions provided in the pair of structural bodies respectively and facing each other via the air gap
Implementation Method 4
Fabry-Perot interference filter
Data Source
AI summary
An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.