Bandpass filters and light-blocking guides isolate photodiodes for accurate, lower-cost color measurement across visible, IR, and UV bands.
Stop layers shift cavity thickness control from etch depth to deposition, improving passband accuracy and cutting multi-spectral filter build time.
A nested filter layout blocks stray light and improves package temperature uniformity to raise S/N ratio and resolution.
An external band pass filter and thicker window block side-entry stray light and stabilize package temperature for higher S/N and resolution.
Delayed feedback lets a dual-actuator variable wavelength filter reach a new film gap faster with less overshoot and fluctuation.
A continuous-wave local oscillator and polarization-diverse coherent detection improve dual-comb sensing SNR while reducing nonlinear impairments.
Precision spacer mesas set a repeatable Fabry-Perot mirror gap before bonding, avoiding epoxy shrinkage and improving alignment yield.
Insulated monitor electrodes use AC capacitance measurement to track mirror spacing and prevent pull-in contact in Fabry-Perot filters.
A band pass window and offset Fabry-Perot filter edge suppress stray light and stabilize package temperature for better detection.
Location-dependent resonance mapping guides short-wave treatment of photopolymer spacers, reducing resonance-wavelength variation.
A Fabry-Perot filter measures electrode resistance to track temperature, preserving wavelength accuracy without external sensors or wiring.
Replacing ion doping with polymer sacrificial layers and atomic layer deposition reduces production costs for mass-manufactured tunable interferometers.
A variable wavelength interference filter uses integrated sealing members between substrates to protect internal optical components.
A wavelength tunable interference filter uses a light absorbing layer to suppress stray light generated by metal electrodes.
A wavelength variable interference filter uses a holding portion with varying rigidity to support the movable reflection film.
Segmented ring electrodes with slits minimize parasitic capacitance, enabling precise gap control between reflecting films despite voltage noise.
An optical filter device uses an annular recessed portion to join substrates horizontally.
A capacitively controlled Fabry-Perot interferometer adjusts mirror gap using direct electrostatic attractive forces between integrated control electrodes.
Parallel variable wavelength bandpass filters with overlapping extraction periods resolve long scan times caused by sequential single-filter gap adjustments.
A tunable optical filter uses a spherical movable mirror to suppress side modes and increase working distance.
Intermediary conductive layer prevents charge accumulation on reflection films, resolving electrostatic force issues for accurate wavelength extraction.
Segmented grooves enable deep etching of flexible portions, resolving tilting issues in MEMS interference filters.
Curved groove end sections in optical filters reduce stress concentration to prevent diaphragm breakage during voltage-driven gap variation.
A Fabry-Perot interference filter uses semi-reflective mirrors separated by a structured layer to achieve spectral selectivity.
A multi-interferometer optical filter uses a shared spacer to reflect distinct electromagnetic spectrum portions across multiple mirror pairs.