Wavelength Variable Interference Filter With Non-Uniform Rigidity Holding
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Solution Overview
Problem
Wavelength variable interference filters with rectangular or square movable portions face issues of bending, leading to irregular gap amounts and reduced precision due to uneven displacement, particularly at corners, causing variations in output wavelength.
Innovation Solution
The design incorporates a holding portion with varying rigidity, where the short-side holding portion has lower rigidity than the long-side holding portion, and includes corner holding portions with lower rigidity to minimize bending, ensuring consistent displacement and reducing wavelength variations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the movable portion is rectangular or square, then the device can be manufactured with simple geometry, but the reflection film bends due to uneven displacement at corners, degrading precision
Solution Approach 1:
The holding portion is designed with non-uniform rigidity distribution, where corner regions have lower rigidity than central regions. This local variation in mechanical property allows different parts of the holding portion to deform differently during displacement, compensating for the corner-drawing effect and preventing reflection film bending while maintaining the simple rectangular geometry of the movable portion.
2Device complexity
If the rigidity of the holding portion is uniform, then the structure is simple to manufacture, but the displacement amount varies across the movable portion, causing bending
Solution Approach 1:
The holding portion incorporates spatially varying rigidity characteristics, with corner portions having lower rigidity than central portions. This local quality differentiation enables the holding portion to provide appropriate support while allowing controlled deformation that ensures uniform displacement distribution across the movable portion, eliminating bending without requiring complex overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration suppresses bending of the movable portion and reflection film, maintaining high precision in wavelength control and output stability across the filter plane.
Implementation Method 1
a wavelength variable interference filter that includes a pair of reflection films... the light that is transmitted through the wavelength variable interference filter can be controlled based on its wavelength relative to the gap amount
Data Source
AI summary
A wavelength variable interference filter includes: a first substrate on which a first reflection film is formed; and a second substrate that includes a movable portion on which a second reflection film facing the first reflection film is formed and a holding portion surrounding an outer circumference of the movable portion and holding the movable portion so that the movable portion is displaceable in a thickness direction of the second reflection film. The movable portion has long and short sides in a plan view. The holding portion includes a long-side holding portion formed along the long side and a short-side holding portion formed along the short side. The rigidity of the short-side holding portion is lower than the rigidity of the long-side holding portion.