Tunable Interference Filter Electrostatic Gap Control
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Solution Overview
Problem
Tunable interference filters face challenges in accurately setting the gap between reflection layers due to electrostatic forces, leading to difficulties in extracting light of desired wavelengths.
Innovation Solution
The design includes a layered part where the reflection film and electrode are stacked on the electrode surface, allowing for surface contact and electrical connection, preventing electrostatic attractive forces and enabling precise control of the gap between reflection films, thereby ensuring accurate extraction of desired wavelengths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the reflection layers are oppositely provided across a gap with capacitance electrodes to form an electrostatic actuator, then the gap between reflection layers can be varied by electrostatic attractive force, but electrostatic force is generated due to charge accumulation on the reflection layers, making it difficult to set the gap to the desired value
Solution Approach 1:
The patent introduces an intermediary conductive layer between the reflection layer and the electrostatic actuator electrode. This conductive layer serves as a mediator that prevents charge accumulation on the reflection layer while maintaining the electrostatic attractive force for gap control, thereby resolving the contradiction between ease of operation and measurement precision
Solution Approach 2:
The patent extracts the charge accumulation problem from the reflection layer by providing a separate conductive layer that handles the electrostatic charge. This separation allows the reflection layer to maintain its optical function without charge accumulation, while the conductive layer manages the electrostatic actuation, resolving the gap setting accuracy issue
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for reliable release of accumulated charge, preventing electrostatic forces and enabling high-accuracy control of the gap, resulting in precise extraction of light wavelengths and a wider wavelength range.
Implementation Method 1
the first electrode and the first reflection film may reliably be brought into surface contact and become electrically connected
Implementation Method 2
a voltage is applied between the capacitance electrodes to vary the gap between the reflection layers by an electrostatic attractive force
Data Source
AI summary
A tunable interference filter includes: first and second opposed substrates; a first reflection film provided on a first reflection film fixing surface of the first substrate; a second reflection film provided on a second reflection film fixing surface of the second substrate and separated from the first reflection film by a gap; and a first electrode provided on a first electrode surface of the first substrate facing the second substrate, wherein the first electrode surface is spaced apart from the second substrate by a different distance than the first reflection film fixing surface, and a layered part in which the first reflection film and the first electrode are stacked is provided on the first electrode surface, the layered part being spaced apart from the second substrate by a larger distance than the first reflection film fixing surface.