Integrated Fabry-Perot Interferometer for Compact Spectrophotometry
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Solution Overview
Problem
Conventional spectrophotometers have limited integration of elements, which affects their cost and restricts their applications, and they often require multiple components for complete spectral analysis, making them less versatile and more cumbersome for use in various environments.
Innovation Solution
A highly integrated Fabry-Perot interferometer with adjustable cavity length, fabricated using micro-machined semiconductor-on-insulator wafers, incorporating detectors and actuation structures for electrostatic control of cavity length, and integrated into a compact spectrophotometer for remote wireless operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional spectrophotometers use multiple discrete components for spectral analysis, then measurement completeness is improved, but device complexity and cost increase
Solution Approach 1:
The patent combines multiple discrete components (Fabry-Perot interferometer, detectors, cavity-length controller, and processing electronics) into a single integrated device. The interferometer and controllers are fabricated using micro-machined semiconductor-on-insulator wafers, merging what were previously separate components into one compact unit that maintains complete spectral analysis capability while reducing overall device complexity
Solution Approach 2:
The integrated device performs multiple functions within a single unit: spectral filtering via the Fabry-Perot interferometer, detection of filtered light, electrostatic control of cavity length, and signal processing. This multi-functional integration allows the device to achieve complete spectral analysis without requiring multiple separate components, thereby reducing device complexity while maintaining measurement completeness
2Adaptability or versatility
If conventional spectrophotometers integrate multiple components, then functional capability is improved, but ease of operation and mobility deteriorate
Solution Approach 1:
By integrating all functional components into a single compact device fabricated on semiconductor wafers, the patent eliminates the need for complex assembly and operation of multiple separate components. The unified structure improves ease of operation and enables mobility while maintaining the versatile functional capabilities needed for various biological and chemical applications
3Ease of manufacture
If conventional spectrophotometers use discrete components, then manufacturing flexibility is improved, but cost increases
Solution Approach 1:
The patent merges multiple discrete components into a single integrated device fabricated using standard semiconductor-on-insulator wafer processes. This integration allows for batch fabrication and economies of scale, reducing the overall cost despite maintaining manufacturing flexibility. The unified structure eliminates the need for assembling multiple separate components, thereby reducing manufacturing complexity and cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables more versatile and cost-effective spectrophotometry with enhanced mobility and capability for in-situ analysis in diverse environments, including biological and chemical applications, by providing a compact, integrated device for determining compound identity and concentration.
Implementation Method 1
Wavelengths of spectrally altered light that resonate within interferometer form filtered exit light
Implementation Method 2
Spectrally altered light enters Fabry-Perot interferometer
Implementation Method 3
electrostatic actuator includes controlled voltage source... when a voltage is applied across mirrors, an electrostatic force of attraction results
Implementation Method 4
detector are sensitive to certain wavelengths of electromagnetic (EM) radiation and generate electrical signals when such wavelengths are detected
Data Source
AI summary
An “integrated” Fabry-Perot interferometer, such as for use in a spectrophotometer, is fabricated by attaching two micro-machined semiconductor-on-insulator wafers to one another. One mirror is formed on each micro-machined wafer. One mirror is supported by a thermally insulated, suspended micro-platform. In some embodiments, interferometer cavity length is adjustable. Detectors are disposed at least partially within the micro-platform. In some embodiments, the interferometer, a light source, and other circuitry and components, such as wireless communications components, are contained in a sealed package that includes a sampling region, thereby providing an integrated spectrophotometer. The integrated spectrophotometer can be implanted, for example, in animal tissue environments, such as for analyzing various compounds in the blood.