Fan-out Semiconductor Package Rear Redistribution Layer

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Solution Overview

Problem

The existing fan-out semiconductor package technologies face challenges in reducing the yield of semiconductor chips due to the need for forming a rear redistribution layer after the semiconductor chip is provided, leading to increased manufacturing costs and time, as well as difficulties in thinning package-on-package structures.

Innovation Solution

The introduction of a rear redistribution layer before the semiconductor chip is disposed, which is formed separately from the encapsulating process, allowing only good products to incorporate this layer, thereby reducing yield loss and enabling a more efficient manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a rear redistribution layer is formed after the semiconductor chip is provided, then the fan-out semiconductor package can be manufactured, but the yield of semiconductor chips decreases

Engineering Contradiction:
Improvemanufacturability of fan-out packageVSAvoidyield of semiconductor chips
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The rear redistribution layer is formed in advance on the carrier substrate before the semiconductor chip is mounted. This preliminary action allows the layer to be pre-positioned and prepared, eliminating the need for post-chip formation processes that would otherwise reduce yield.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The manufacturing process is segmented into independent stages: forming the rear redistribution layer on the carrier substrate separately, then mounting the semiconductor chip, and finally forming the encapsulant. This segmentation allows each component to be optimized independently without compromising overall yield.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If a rear redistribution layer is formed after the semiconductor chip is provided, then the package structure is complete, but manufacturing time and costs increase

Engineering Contradiction:
Improvecompleteness of package structureVSAvoidmanufacturing time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The rear redistribution layer is formed in advance during the carrier substrate preparation stage, before chip mounting. This eliminates subsequent processing steps and reduces total manufacturing time and associated costs.

Inventive Principle:
Principle #10Preliminary action

3Ease of manufacture

If the package structure is thick, then the rear redistribution layer can be formed, but package-on-package structures cannot be thinned

Engineering Contradiction:
Improveformability of rear redistribution layerVSAvoidthickness of package
Core Design Contradiction:
Ease of manufactureVSLength of stationary object

Solution Approach 1:

The rear redistribution layer is formed on the carrier substrate in a planar dimension before chip mounting, allowing the layer to be integrated without increasing the vertical thickness of the final package. This enables thin package-on-package structures while maintaining the functionality of the rear redistribution layer.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS10770418B2Fan-out semiconductor package
Publication Date: 2020.09.08 SAMSUNG ELECTRONICS CO LTD
  • US10770418B2 patent drawing
  • US10770418B2 patent drawing
  • US10770418B2 patent drawing

AI summary

A fan-out semiconductor package includes: a first connection member having a through-hole; a semiconductor chip disposed in the through-hole and having an active surface having connection pads disposed thereon and an inactive surface opposing the active surface; an encapsulant encapsulating at least portions of the first connection member and the inactive surface of the semiconductor chip; a second connection member disposed on the first connection member and the active surface of the semiconductor chip; a resin layer disposed on the encapsulant; and a rear redistribution layer embedded in the encapsulant so that one surface thereof is exposed by the encapsulant, wherein the resin layer covers at least portions of the exposed one surface of the rear redistribution layer, and the rear redistribution layer is electrically connected to the redistribution layer of the first connection member through connection members formed in first openings penetrating through the resin layer and the encapsulant.