Ferroelectric Memory Devices Using 2D Electron Gas Channels

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Solution Overview

Problem

Current ferroelectric memory devices face challenges in achieving stable polarization retention and high tunneling currents due to the need for thick ferroelectric barriers, which compromise signal strength and efficiency.

Innovation Solution

The development of ferroelectric memory devices incorporating a two-dimensional electron gas channel and a tubular ferroelectric dielectric layer, allowing for increased ferroelectric material thickness without reducing reading current, and utilizing specific two-dimensional semiconductor materials like hexagonal boron nitride, fluorinated graphene, and molybdenum disulfide to enhance polarization stability and conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If thick ferroelectric barriers are used to achieve stable polarization retention, then polarization stability is improved, but tunneling current and signal strength deteriorate

Engineering Contradiction:
Improvepolarization retention stabilityVSAvoidtunneling current strength
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The patent introduces a two-dimensional electron gas channel as an intermediary layer between the ferroelectric barrier and the electrode. This 2DEG channel acts as a mediator that enables efficient charge transport and tunneling while allowing the ferroelectric barrier to maintain its thick structure for stable polarization retention. The 2DEG forms a conductive pathway that resolves the contradiction between barrier thickness and current strength.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the physical and electrical parameters of the channel by creating a two-dimensional electron gas with high carrier density and mobility. By transforming the channel from a conventional three-dimensional semiconductor into a 2DEG system, the electrical conductivity and tunneling characteristics are dramatically improved, allowing thick ferroelectric barriers to maintain both stability and high current strength.

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If conventional semiconductor channels are used, then device structure is simple, but polarization retention and signal efficiency deteriorate

Engineering Contradiction:
Improvechannel structure simplicityVSAvoidpolarization retention
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent transforms the channel from a conventional three-dimensional semiconductor structure into a two-dimensional electron gas system by changing the dimensional parameter and carrier concentration. This parameter change creates a highly conductive 2DEG channel that significantly improves polarization retention and signal efficiency while adding only minimal structural complexity through the formation of the 2DEG layer.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If thin ferroelectric barriers are used to maintain high reading currents, then tunneling efficiency is improved, but polarization stability deteriorates

Engineering Contradiction:
Improvereading current strengthVSAvoidpolarization retention stability
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The two-dimensional electron gas channel serves as an intermediary that decouples the relationship between barrier thickness and current strength. By introducing this conductive mediation layer, the system can use thick ferroelectric barriers for stability while the 2DEG maintains high tunneling efficiency and reading current strength, resolving the inverse relationship between these parameters.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly improves polarization retention and maintains high reading currents, enabling efficient non-volatile memory storage with improved stability and low power consumption.

Implementation Method 1

a two-dimensional electron gas channel, a gate electrode, and a ferroelectric element located between the gate electrode and the two-dimensional electron gas channel

Methodology Applied
Scientific EffectTwo-dimensional electron gas:

Implementation Method 2

The dipole moment of the ferroelectric material is programmed in two different orientations (e.g., 'up' or 'down' polarization positions based on atom positions, such as oxygen and/or metal atom positions, in the crystal lattice) depending on the polarity of the applied electric field to the ferroelectric material to store information

Methodology Applied
Scientific EffectFerroelectric polarization:

Implementation Method 3

a two-dimensional Van der Waals ferroelectric material layer located on the two-dimensional electron gas channel and comprising a ferroelectric material selected from CuInP2S6, a-In2Se3, g-SbP, g-SbAs, or Group IV monochalcogenide material

Methodology Applied
Scientific EffectVan der Waals force: Van der Waals Force

Data Source

PatentUS11107516B1Ferroelectric memory devices containing a two-dimensional charge carrier gas channel and methods of making the same
Publication Date: 2021.08.31 SANDISK TECHNOLOGIES LLC
  • US11107516B1 patent drawing
  • US11107516B1 patent drawing
  • US11107516B1 patent drawing

AI summary

A ferroelectric memory device includes a two-dimensional electron gas channel, a gate electrode, and a ferroelectric element located between the gate electrode and the two-dimensional electron gas channel.