Few-Turn RF Resonator Geometry for High-Q Ion Beam Acceleration

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Solution Overview

Problem

Conventional RF accelerators face challenges in achieving high Q factors necessary for efficient ion beam acceleration, particularly when transitioning from lower to higher frequencies, leading to issues like arcing and reliability concerns due to increased power losses and eddy currents.

Innovation Solution

A novel RF resonator design with a single-turn coil configuration and specific geometric constraints is introduced, which includes a large tube diameter and reduced housing length, maintaining constant inductance while doubling the angular resonance frequency, thereby enhancing the Q factor and reducing eddy current induction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional RF resonators are used for ion beam acceleration, then RF voltage generation is achieved, but Q factor is insufficient leading to high power losses and eddy currents

Engineering Contradiction:
ImproveQ factorVSAvoidpower losses
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies parameter changes by modifying the coil geometry parameters (reducing the number of turns to three or fewer, reducing coil length to less than six times the tube diameter, and optimizing the ratio of housing length to coil radius) to achieve a high Q factor while minimizing power losses and eddy currents in the resonator system

Inventive Principle:
Principle #35Parameter changes

2Productivity

If RF frequency is increased for acceleration, then acceleration efficiency improves, but arcing and reliability concerns increase due to higher power losses

Engineering Contradiction:
Improveacceleration efficiencyVSAvoidarcing resistance
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent changes the resonator's geometric parameters (coil turns, coil length, housing dimensions) to optimize the Q factor at higher frequencies, thereby maintaining acceleration efficiency while reducing power losses that cause arcing and reliability issues

Inventive Principle:
Principle #35Parameter changes

3Reliability

If multi-turn coils are used for resonator, then inductance is sufficient, but eddy current induction increases reducing Q factor

Engineering Contradiction:
ImproveQ factorVSAvoideddy currents
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the harmful multi-turn coil configuration and replaces it with a single-turn or few-turn coil design, eliminating the source of eddy current induction while maintaining sufficient inductance through optimized geometric parameters to achieve a high Q factor

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed design effectively doubles the Q factor, ensuring stable high RF amplitudes and energy transfer, minimizing arcing and power loss, thus improving the efficiency and reliability of ion beam acceleration.

Implementation Method 1

high-Q resonators for conversion of RF power (typically at low impedance of 50 ohms) into high RF voltages

Methodology Applied
Scientific EffectElectromagnetic resonance: Resonance

Implementation Method 2

RF resonator having a high Q factor for an ion implantation system

Methodology Applied
Scientific EffectQ factor: Resonance

Implementation Method 3

The coil, for example, comprises three or fewer turns n of the tube about the first axis

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 4

issues like arcing and reliability concerns due to increased power losses and eddy currents

Methodology Applied
Scientific EffectEddy currents: Eddy Currents

Data Source

PatentUS20260025904A1RF resonator with high q value for ion beam accleleration
Publication Date: 2026.01.22 AXCELIS TECHNOLOGIES INC
  • US20260025904A1 patent drawing
  • US20260025904A1 patent drawing
  • US20260025904A1 patent drawing

AI summary

A resonator is provided for an RF linear accelerator and has a housing defining a housing volume. An electrode is configured to accelerate ions and is disposed external to the housing volume. A tube is electrically conductive and has an electrode portion and a coil portion. The electrode portion is electrically coupled to the electrode. The tube is generally defined by a tube diameter. The coil portion has a predetermined shape when viewed along a first axis and is disposed within the housing volume. The coil portion defines a coil length when viewed perpendicular to the first axis. The coil portion of the tube is turned three or fewer turns about the first axis. The coil length is less than approximately six times the tube diameter, and six times the tube diameter is less than approximately 1500 mm.