Focused Ion Beam Cross-Section Imaging for Targeted Biological Samples
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Solution Overview
Problem
Current cross-section processing and observation methods, such as 'Cut&See', are inefficient when dealing with biological samples, as they require processing and observing the entire sample to locate and image small target objects, leading to excessive time and data storage needs due to the generation of numerous unnecessary cross-section images.
Innovation Solution
A method and apparatus that utilize an optical microscope to identify the three-dimensional position of a particular observation target object within a sample, allowing focused ion beam processing only on specific regions, thereby reducing unnecessary processing and image acquisition, and using electron beam imaging to obtain high-resolution cross-section images of the target area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the entire sample is processed and observed using FIB and SEM to locate small target objects, then the target objects can be found and imaged, but the time required and data storage needs increase significantly due to processing the entire sample
Solution Approach 1:
The patent applies preliminary action by using optical microscopy to locate and identify the three-dimensional position of target objects before performing FIB cross-section processing. This preliminary localization step prevents unnecessary processing of entire samples, significantly reducing observation time while maintaining accurate target object location. The optical microscope provides a wide field of view to quickly identify target positions, which are then used to guide subsequent high-resolution FIB-SEM processing only in the regions containing target objects.
2Measurement precision
If FIB cross-section processing is performed on the entire sample to ensure target objects are captured, then high-resolution images of target objects can be obtained, but a massive number of unnecessary cross-section images are generated
Solution Approach 1:
The patent applies local quality by performing FIB cross-section processing selectively only in regions where target objects are detected by the optical microscope, rather than processing the entire sample uniformly. This localized processing approach maintains high image resolution for target objects while dramatically reducing the total number of cross-section images generated. The processing parameters and field of view are adjusted locally based on the detected target object positions and sizes.
3Measurement precision
If the field of view is narrowed and processing intervals are reduced to obtain high-resolution three-dimensional images of small target objects, then image quality improves, but the number of cross-section images increases significantly
Solution Approach 1:
The patent uses preliminary optical microscopy observation to identify the precise three-dimensional position and extent of target objects before FIB processing. This allows the system to calculate the minimum necessary processing intervals and field of view required to capture complete target objects, avoiding excessive sampling. The processing parameters are optimized based on the actual target object characteristics rather than using fixed conservative intervals, thereby reducing the number of cross-section images while maintaining sufficient three-dimensional resolution.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time and data storage required for obtaining high-resolution three-dimensional images of specific target objects by precisely targeting the region of interest, minimizing unnecessary processing and image data, and enhancing the efficiency of the observation process.
Implementation Method 1
by using a focused ion beam, irradiating a particular region in which a particular observation target object is present in a sample
Implementation Method 2
irradiating an electron beam, obtaining a cross-sectional image of a region of a predetermined size including the particular observation target object
Data Source
AI summary
A method for cross-section processing and observation, and apparatus therefor, includes performing a position information obtaining process of observing the entirety of a sample by using an optical microscope or an electron microscope, and obtaining three-dimensional position coordinate information of a particular observation target object included in the sample; performing a cross-section processing process of irradiating a particular region in which the object is present by using a focused ion beam based on the information, and exposing a cross section of the region; performing a cross-section image obtaining process of irradiating the cross section by using an electron beam, and obtaining a cross-section image of a predetermined size region including the object; and performing a three-dimensional image obtaining process of repeating the cross-section processing process and the cross-section image obtaining process at predetermined intervals in a predetermined direction, and obtaining a three-dimensional image from the multiple cross-section images.