FIB Milling Probe Tips Using Cylindrical Stock With Flat Distal End
Solution Overview
Problem
Current FIB milling techniques for producing high aspect ratio probe tips for atomic force microscopes are inefficient due to complex alignment issues, excessive material removal, and lengthy processing times, resulting in suboptimal tip performance and limited throughput.
Innovation Solution
The use of a cylinder-shaped tip stock with a flat distal end facilitates easier alignment and milling, reducing the number of steps and material required, allowing for the production of high aspect ratio tips in less than 5 minutes with improved operational characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional FIB milling techniques are used to produce high aspect ratio probe tips, then tip performance can be achieved, but the process requires complex alignment procedures and excessive material removal leading to lengthy processing times
Solution Approach 1:
The tip stock is pre-formed with a cylindrical shape and flat distal end before FIB milling, establishing known reference planes that simplify subsequent alignment procedures and reduce processing time during the actual tip fabrication
Solution Approach 2:
The invention changes the geometric parameters of the tip stock from conventional shapes to a specific cylindrical configuration with a flat distal end, optimizing the stock shape to facilitate easier and faster alignment during FIB milling while maintaining the ability to produce high aspect ratio tips
2Productivity
If conventional FIB milling techniques are used, then probe tips can be produced, but excessive material must be removed resulting in lengthy processing times
Solution Approach 1:
The tip stock is pre-shaped into a cylinder with a flat distal end that defines the future tip location, allowing the FIB milling process to remove only the necessary minimal amount of material rather than excessive material, thereby increasing productivity
Solution Approach 2:
By changing the stock geometry to a cylindrical shape with specific dimensional parameters, the invention optimizes the material distribution so that less material needs to be removed during FIB milling, directly improving throughput while maintaining tip quality
3Manufacturing precision
If complex alignment procedures are used in FIB milling, then alignment precision can be achieved, but the number of processing steps increases
Solution Approach 1:
The cylindrical tip stock with flat distal end is prepared in advance with built-in reference features, eliminating the need for complex alignment procedures during FIB milling by providing inherent alignment cues that simplify the process
Solution Approach 2:
The invention changes the stock shape parameters to include a flat distal end that serves as a natural reference plane, reducing the complexity of alignment procedures while maintaining high alignment accuracy through the optimized geometric configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the production of high aspect ratio tips in fewer and less complicated FIB machining steps, improving yield and speed, and enhancing the operational performance of probe devices for applications like deep trench AFM.
Implementation Method 1
a method of producing a probe device using focused ion beam (FIB) etching
Data Source
Figure 1
Figure 2A~4B
Figure 5A~5D
AI summary
A method of producing a probe device 50 for a metrology instrument such as an AFM includes providing a substrate and forming a stock extending upwardly from the substrate. The stock 60 is preferably FIB milled to form a tip 76 of the probe device. The tip preferably has a high aspect ratio, with a height that is at least about 1 micron for performing critical dimension (e.g., deep trench) atomic force microscopy. The stock is preferably pedestal shaped having a distal end 68 that is substantially planar which can be machined into a tip in at least less than about 2 minutes. With the preferred embodiments, the FIB milling step can be completed in substantially fewer and less complicated steps than known techniques to produce a high aspect ratio tip suitable for DT-AFM in less than about one minute.