Focused Ion Beam Sample Transfer Mechanism
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Solution Overview
Problem
The complexity of the side-entry-type stage in focused ion beam apparatuses makes it difficult to move micro sample-pieces between the FIB device and TEM apparatus, limiting the movable range and size due to interfering moving lines and requiring separate operation units along X, Y, and Z-axes.
Innovation Solution
A focused ion beam apparatus with a sample tray movable along X, Y, and Z-axes, and a side-entry-type carrier with a detachable engagement part that moves in conjunction with the sample tray, eliminating the need for individual moving units and simplifying operations, along with a load lock unit for maintaining airtightness and a rotating carrier for easy insertion and removal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a side-entry-type stage with separate operation units for X, Y, and Z-axes is used to move micro sample-pieces, then the sample can be moved between FIB and TEM apparatuses, but the structure becomes complex and difficult to operate
Solution Approach 1:
The patent merges the X, Y, and Z-axis operation units into a single integrated operation unit that controls all three axes simultaneously. This allows the sample tray to move in three-dimensional space with one operation unit, eliminating the need for separate control mechanisms for each axis and significantly simplifying the stage structure while maintaining full sample movement capability.
Solution Approach 2:
The sample tray is designed with multi-functionality to serve both FIB processing and TEM observation purposes. By integrating the carrier that holds micro sample-pieces directly onto the sample tray, the system achieves universal functionality for both apparatus types without requiring separate positioning systems, thereby reducing structural complexity.
2Measurement precision
If separate operation units along X, Y, and Z-axes are provided for the sample stage and side-entry-type stage, then precise sample positioning is achieved, but the movable range is limited due to interfering moving lines
Solution Approach 1:
The patent combines multiple operation units into a single integrated unit that controls the sample tray's movement along X, Y, and Z-axes. This unified control system eliminates interfering moving lines between separate units and expands the movable range while maintaining precise positioning capability through coordinated multi-axis control.
3Ease of operation
If a common sample holder is used for FIB device and TEM apparatus, then sample transfer between devices is simplified, but the carrier size and weight increase
Solution Approach 1:
The system is segmented into a sample tray for FIB processing and a carrier for TEM observation. The carrier is detachably coupled to the sample tray, allowing the carrier to be a lightweight, compact component optimized for TEM while the sample tray handles the heavier FIB processing functions. This segmentation reduces the weight of the moving carrier while maintaining ease of sample transfer through the detachable coupling mechanism.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for easy and efficient movement of micro sample-pieces using simple configurations, reducing the size and weight of the carrier, and simplifying operations, enabling seamless transfer between FIB and TEM apparatuses.
Implementation Method 1
a focused ion beam column irradiating the sample by using a focused ion beam to obtain a micro sample-piece
Implementation Method 2
a carrier engagement part, detachably engaged to the carrier, is provided which moves the carrier in accompaniment to the movement of the sample tray
Implementation Method 3
a load lock unit for maintaining airtightness
Data Source
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AI summary
Disclosed herein is a focused ion beam apparatus moving a micro sample-piece between the focused ion beam apparatus and a sample observation apparatus by using simple configurations. The focused ion beam apparatus includes: a sample tray on which a sample is placed; a focused ion beam column irradiating the sample with a focused ion beam to obtain a micro sample-piece; a sample chamber receiving the sample tray and the focused ion beam column therein; a side-entry-type carrier being inserted into and removed from the chamber, with a front end side holding the sample-piece; and a sample-piece moving unit moving the sample-piece between the plate and the carrier, wherein the plate is movable on at least X, Y, and Z-axes respectively, and an end of the plate is provided with a carrier engagement part detachably fastened with the carrier, the carrier engagement part being moved with the carrier in company with movement of the plate.