Filter Device Coil Cooling via Ground Member Convection
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Solution Overview
Problem
In plasma processing apparatuses, the filters used to block or attenuate high-frequency power in power feed lines for heaters tend to overheat due to AC supply, and existing cooling methods are insufficient, especially when high-frequency power is increased, leading to temperature issues and variations in impedance-frequency characteristics across multiple filters.
Innovation Solution
A filter device with coils and ground members arranged in a specific layout to promote air convection for cooling, where each coil is spaced apart from others and ground members are equally spaced around them, reducing temperature and minimizing differences in impedance-frequency characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the high frequency power is increased to improve plasma processing performance, then the processing efficiency is improved, but the coil temperature becomes excessively high and existing cooling methods become insufficient
Solution Approach 1:
The invention transitions from two-dimensional planar cooling (blowing air into a closed casing) to three-dimensional radial convection cooling by arranging ground members vertically around the coil. This spatial reconfiguration creates multiple convection paths in different directions, significantly enhancing heat dissipation capacity and enabling effective cooling even at high power levels.
Solution Approach 2:
The invention utilizes natural convection currents of air (a pneumatic approach) to cool the coil. By creating vertical temperature differences through the ground member arrangement, hot air rises and cool air flows in to replace it, establishing a continuous convective cooling flow that efficiently removes heat from the coil without requiring forced air circulation systems.
2Manufacturing precision
If multiple filters are provided in power feed lines for multiple heaters, then temperature control of the target object is improved, but the difference in impedance-frequency characteristics among filters increases
Solution Approach 1:
The invention applies localized structural modifications to each filter unit by introducing ground members specifically around the coil area. This local enhancement of cooling capability ensures that each filter maintains uniform temperature distribution and consistent electrical characteristics, thereby reducing variations in impedance-frequency characteristics across multiple filters while preserving their individual temperature control functions.
Solution Approach 2:
The invention changes the thermal and electrical parameters of the filter by introducing ground members that alter the heat dissipation rate and electrical field distribution. This parameter modification ensures that all filters operate under similar thermal and electrical conditions, thereby standardizing their impedance-frequency characteristics while maintaining their temperature control capabilities.
3Device complexity
If a closed casing is used to accommodate the coil, then the filter structure is compact and protected, but the coil temperature becomes excessively high due to insufficient cooling
Solution Approach 1:
The invention transforms the closed casing into a structure with controlled openness by introducing ground members that create vertical channels and convection paths. This semi-porous configuration maintains the protective and compact nature of the casing while enabling effective air flow and heat dissipation, resolving the contradiction between structural integrity and thermal management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively decreases the temperature of the coils and stabilizes impedance-frequency characteristics across filters, enhancing their performance and reliability in high-frequency applications.
Implementation Method 1
A filter device with coils and ground members arranged in a specific layout to promote air convection for cooling
Implementation Method 2
The coil generates heat due to the supply of AC (Alternating Current) to the heater and the supply of the high frequency power to the lower electrode
Data Source
AI summary
A filter device includes a plurality of coils of which central axes are spaced apart from one another and in parallel to one another and a plurality of ground members spaced apart from one another and extending in parallel to the central axes of the coils outside of the coils. Each of the coils is spaced apart from another coil closest thereto by a first distance. Each of the ground members is spaced apart from a coil closest thereto by a second distance. The number of ground members spaced apart from each of the coils by the second distance is the same.