Fine-Pitch Semiconductor Package Layout Without Costly Interposers

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Solution Overview

Problem

The increasing density of input/output (I/O) pads on semiconductor dies due to evolving technologies makes semiconductor packaging more difficult, adversely affecting yield.

Innovation Solution

A semiconductor package device is manufactured with a first dielectric layer, a first interconnection layer, and a second dielectric layer, where the second interconnection layer extends into the first dielectric layer to electrically connect with the first interconnection layer, and a seed layer contacts the exposed portion of the first interconnection layer, allowing for a fine-pitch redistribution structure that reduces manufacturing costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If the density of I/O pads on semiconductor dies is increased to accommodate more circuits, then the functional integration is improved, but the packaging difficulty increases and yield decreases

Engineering Contradiction:
Improvenumber of I/O padsVSAvoidpackaging difficulty
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent transitions from a planar 2D pad layout to a 3D vertical interconnection structure. Multiple interconnection layers are stacked vertically with dielectric layers in between, allowing I/O pads to be distributed across multiple vertical levels. This dimensional transformation enables higher I/O density without increasing the lateral footprint, thereby facilitating packaging of high-density dies without proportionally increasing packaging complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested interconnection layers where conductive structures are embedded within dielectric layers, which are in turn embedded within a substrate or package structure. The fine-pitch interconnection layers are nested within the package substrate, with each layer containing conductive traces, vias, or pads that are embedded in dielectric material. This nested arrangement allows multiple I/O connections to be packed into a compact volume, enabling high I/O density while maintaining manageable packaging dimensions and processes.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Manufacturing precision

If expensive interposers are used to achieve fine-pitch interconnections, then the packaging precision is improved, but the manufacturing cost increases

Engineering Contradiction:
Improveinterconnection pitchVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent replaces expensive, complex interposer structures with a cost-effective alternative: fine-pitch interconnection layers formed directly within a package substrate using standard semiconductor fabrication processes. The interconnection structure consists of conductive traces and vias embedded in dielectric layers, which can be manufactured using conventional photolithography, etching, and deposition techniques already prevalent in the industry. This approach achieves fine-pitch interconnections without requiring costly interposer materials or additional specialized manufacturing steps, thereby reducing overall manufacturing cost while maintaining the required precision.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent extracts the interconnection function from a separate interposer component and integrates it directly into the package substrate. Instead of using a distinct interposer layer that requires additional bonding and alignment steps, the fine-pitch interconnection layers are formed as an integral part of the substrate structure. This extraction eliminates the need for separate interposer manufacturing, handling, and assembly, thereby reducing manufacturing complexity and cost while achieving the same fine-pitch interconnection performance.

Inventive Principle:
Principle #2Taking out (Extraction)

Data Source

PatentUS11956897B2Semiconductor package device and method of manufacturing the same
Publication Date: 2024.04.09 ADVANCED SEMICON ENG INC
  • US11956897B2 patent drawing
  • US11956897B2 patent drawing
  • US11956897B2 patent drawing

AI summary

A semiconductor package device includes a first dielectric layer, a first interconnection layer, a second interconnection layer, and a second dielectric layer. The first dielectric layer has a first surface, a second surface opposite to the first surface and a lateral surface extending between the first surface and the second surface. The first interconnection layer is within the first dielectric layer. The second interconnection layer is on the second surface of the first dielectric layer and extends from the second surface of the first dielectric layer into the first dielectric layer to electrically connect to the first interconnection layer. The second dielectric layer covers the second surface and the lateral surface of the first dielectric layer and the second interconnection layer.