FinFET Trimmable Resistor Layout for Adjustable Resistance

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Solution Overview

Problem

Conventional FinFET devices and fabrication methods face challenges in achieving optimal performance and complexity in manufacturing, particularly in scaling down to nanometer technology process nodes, requiring advancements in resistor circuit design for improved efficiency and cost-effectiveness.

Innovation Solution

A trimmable resistor circuit is designed using FinFET devices arranged in multiple rows with strategically placed resistors and gate structures, allowing for adjustable resistance values by controlling voltage applications to achieve a predetermined resistance range, enhancing layout area utilization and reducing parasitic resistances.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional FinFET devices are used for scaling down to nanometer technology process nodes, then device density and current flow are improved, but manufacturing complexity and processing difficulty increase

Engineering Contradiction:
Improvedevice densityVSAvoidmanufacturing complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The resistor circuit is divided into multiple identical FinFET-based resistor units connected in parallel, where each unit contains a FinFET device with source, drain, and gate structures. This segmentation allows the total resistance to be precisely controlled by adjusting the number of parallel units, thereby achieving desired resistance values while maintaining manufacturing simplicity through repetitive use of the same basic structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The FinFET devices serve multiple functions: they act as both the resistive elements and the trimmable switches. By applying control voltages to the gate structures, the same FinFET devices can be turned on or off to adjust the effective resistance, eliminating the need for separate switching components and reducing overall circuit complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If resistor circuits are designed with fixed resistance values, then manufacturing simplicity is maintained, but adaptability and customization capability are reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidresistance customization
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The resistor circuit incorporates trimmable resistance by using FinFET devices that can be dynamically switched between on and off states through gate voltage control. This allows the resistance value to be adjusted after manufacturing by selectively turning on or off specific FinFET units, providing post-fabrication customization capability without requiring complex manufacturing processes.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The resistance value is changed by altering the operational state of the FinFET devices through voltage application to gate structures. By changing the gate voltage from zero to a sufficient level, the FinFET transitions from off to on state, effectively changing the resistance of that unit from very high to a defined low value, thus achieving resistance trimming.

Inventive Principle:
Principle #35Parameter changes

3Adaptability or versatility

If multiple resistors are used to achieve trimmable resistance values, then resistance adjustability is improved, but layout area and device complexity increase

Engineering Contradiction:
Improveresistance adjustabilityVSAvoidlayout area
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

Multiple FinFET-based resistor units are connected in parallel configuration, merging their conductive paths to achieve the desired resistance value. This parallel arrangement reduces the total layout area compared to series connections, as the current paths can be arranged compactly side-by-side, while still providing adjustable resistance through selective switching of individual units.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The trimmable resistor circuit effectively provides a customizable resistance value within a range of 10 ohms to 1000 ohms, with a rated current greater than 1 mA, improving manufacturing efficiency and reducing complexity by enabling precise resistance adjustments.

Implementation Method 1

The first gate structures in the first row and the sixth row are turned on, thereby enabling the gate structures in the first row and the sixth row to be short-circuited

Methodology Applied
Scientific EffectField effect transistor operation: Conduction (electrical)

Data Source

PatentUS11990469B2Trimmable resistor circuit and method for operating the trimmable resistor circuit
Publication Date: 2024.05.21 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11990469B2 patent drawing
  • US11990469B2 patent drawing
  • US11990469B2 patent drawing

AI summary

A trimmable resistor circuit and a method for operating the trimmable resistor circuit are provided. The trimmable resistor circuit includes first sources/drains and first gate structures alternatively arranged in a first row, second sources/drains and second gate structures alternatively arranged in a second row, third sources/drains and third gate structures alternatively arranged in a third row, first resistors disposed between the first row and the second row, and second resistors disposed between the second row and the third row. In the method for operating the trimmable resistor circuit, the first gate structures in the first row and the third gate structures in the third row are turned on. Then, the second gate structures in the second row are turned on/off according to a predetermined resistance value.