Flat End-Block Radial Arrangement for Sputtering Target
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Solution Overview
Problem
The existing sputtering apparatuses face dimensional constraints when mounting rotating sputtering targets, as traditional end-blocks occupy significant space, limiting the usable target length and requiring complex systems to handle rotation, energization, cooling, and sealing.
Innovation Solution
The design of a flat end-block that incorporates various functional means such as drive, electrical contact, bearing, coolant, and vacuum seals radially, rather than longitudinally, to reduce the axial length and optimize space usage, allowing for a more compact and efficient mounting of rotating sputtering targets.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Length of stationary object
If traditional end-blocks are used to mount rotating sputtering targets, then all necessary functions (rotation, energization, cooling, sealing) can be provided, but the axial length occupied is significant, limiting the usable target length
Solution Approach 1:
The patent applies dimensional reorganization by arranging functional components (drive mechanism, electrical contacts, bearings, coolant channels, vacuum seals) in a radial configuration around the target axis rather than sequentially along the axial direction. This transforms the spatial arrangement from one-dimensional (axial) to two-dimensional (radial), significantly reducing the axial footprint of the end-block while accommodating all necessary functions for rotating sputtering targets.
2Productivity
If rotating tubular targets are used to increase throughput and usage time, then productivity improves, but a complex and space-occupying end-block is required to handle rotation and isolation
Solution Approach 1:
The patent merges multiple discrete functional systems (rotation drive, electrical power delivery, coolant circulation, vacuum sealing) into a single integrated end-block structure. By combining these functions radially around the target axis, the design reduces the number of separate components and mounting locations, thereby decreasing overall system complexity while enabling rotating target operation for improved productivity.
Solution Approach 2:
The end-block design incorporates multi-functionality by integrating various operational requirements (mechanical support, rotation drive, electrical contact, cooling, sealing) into a single universal structure that handles all aspects of rotating target operation, eliminating the need for multiple separate systems.
3Length of stationary object
If the end-block is made flat to reduce axial length, then space usage is optimized, but housing all functional means (energize, cool, seal, support, rotate) becomes more challenging
Solution Approach 1:
The patent resolves this contradiction by transitioning from axial to radial spatial organization. All functional means are arranged in concentric radial layers around the target axis, allowing the end-block to maintain a compact axial profile while providing adequate space for each function in the radial dimension. This dimensional shift enables the flat end-block design to accommodate drive mechanisms, electrical contacts, bearings, coolant channels, and vacuum seals without compromising versatility.
Data Source
AI summary
An end-block for use in a tubular magnetron sputtering apparatus is disclosed. Such an end-block rotatably transfers movement, coolant 5 and electrical current to the target while maintaining vacuum integrity and a closed coolant circuit. It hence comprises a drive means, a rotary electrical contact means, a bearing means, a number of rotary coolant seal means and a number of vacuum seal means. The inventive end-block occupies a minimal axial length along the target thus allowing 10 space savings in existing equipment such as e.g. display coaters. The axial length is reduced by mounting at least two of the means radial to one another.