Flexible pipe and temperature control system

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Solution Overview

Problem

Flexible metal bellows pipes used in temperature control systems generate vibrations and increase energy consumption due to friction and pressure loss, which can degrade processing accuracy and efficiency, especially when the temperature control unit and processing apparatus are separated or on different floors.

Innovation Solution

A flexible pipe design featuring a metal bellows pipe with an inner fluorine-based resin tube that reduces friction and pressure loss by having a smoother inner surface, thereby minimizing energy consumption and maintaining processing accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a metal bellows pipe is used as a flexible pipe, then the processing apparatus and temperature control unit can be placed with high degree of freedom, but minute vibrations are generated and processing accuracy is deteriorated

Engineering Contradiction:
Improveplacement flexibilityVSAvoidprocessing accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent applies the nesting principle by placing a flexible tube inside the bellows pipe, creating a nested structure where the inner flexible tube is surrounded by the outer bellows pipe. This nested configuration allows the inner tube to provide a smooth flow path while the outer bellows pipe provides flexibility for placement, thereby resolving the contradiction between placement flexibility and processing accuracy.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Measurement precision

If a pipe-shaped braided body is placed at the inner side of the bellows pipe to suppress vibrations, then processing accuracy is improved, but friction between the pipe and fluid is increased and energy consumption is increased

Engineering Contradiction:
Improveprocessing accuracyVSAvoidenergy consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent applies the local quality principle by making only the inner surface of the flexible tube smooth, specifically the surface that contacts the fluid. This localized smooth surface reduces friction and pressure loss for the flowing fluid, thereby reducing energy consumption while still maintaining the vibration suppression function of the overall flexible pipe structure.

Inventive Principle:
Principle #3Local quality

3Object-generated harmful factors

If friction between the pipe and fluid is increased to suppress vibrations, then vibration is reduced, but pressure loss of the fluid is increased and pump energy consumption is increased

Engineering Contradiction:
ImprovevibrationVSAvoidpressure loss
Core Design Contradiction:
Object-generated harmful factorsVSLoss of energy

Solution Approach 1:

The nested structure of the flexible tube within the bellows pipe allows the inner tube to provide a smooth flow path that minimizes friction and pressure loss, while the outer bellows pipe structure provides vibration suppression. This nested configuration resolves the contradiction by separating the vibration suppression function from the fluid flow path.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The flexible pipe design reduces energy consumption of the temperature control unit by minimizing pressure loss and maintaining processing accuracy, even when the temperature control unit and processing apparatus are separated or on different floors.

Implementation Method 1

an inner surface of the flexible tube where a fluid flows is smooth

Methodology Applied
Scientific EffectFriction: Friction

Data Source

PatentUS11566728B2Flexible pipe and temperature control system
Publication Date: 2023.01.31 TOKYO ELECTRON LTD
  • US11566728B2 patent drawing
  • US11566728B2 patent drawing
  • US11566728B2 patent drawing

AI summary

Energy consumption of a temperature control unit can be reduced. A flexible pipe 13 includes a bellows pipe 130 made of a metal and an inner tube 131. The inner tube 131 is provided at an inner side of the bellows pipe 130, and an inner surface of the inner tube where a fluid flows is smooth. The inner surface of the inner tube 131 where the fluid flows may be smoother than a surface of a braided body. Further, the inner tube 131 may be made of, for example, a conductive material. An inner side of the inner tube 131 where the fluid flows may be coated with a conductive film.