Flip-Chip Micro-LED Mesa Structure for Higher Pixel Density

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Solution Overview

Problem

Existing micro-LED devices face challenges in efficient manufacturing and light-emitting area maximization due to their small size and complex assembly processes, particularly in achieving high density and brightness for emerging display applications like wearable and large-area displays.

Innovation Solution

A thin film flip-chip (TFFC) design for micro-LEDs with a mesa structure that includes a p-contact layer contacting the p-type layer, a cathode contacting the n-type layer's sidewall, and an anode contacting the p-contact layer's top surface, with dielectric materials isolating these components to enhance light extraction and handling efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional pick-and-place assembly is used for micro-LEDs, then individual LEDs can be assembled, but the assembly process becomes slow and error-prone as die size decreases

Engineering Contradiction:
Improveassembly speedVSAvoidalignment accuracy
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent merges multiple micro-LED dies into a single integrated structure grown on a common substrate. The semiconductor layers are formed as a unified component with shared substrate, eliminating the need for separate pick-and-place assembly of individual dies. This combining approach directly resolves the contradiction by enabling mass production without alignment errors.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent performs preliminary actions by pre-assembling multiple micro-LED dies on a common substrate during the epitaxial growth process itself. The dies are positioned and integrated before final device completion, allowing subsequent processing to treat them as a single unit. This preliminary integration eliminates later assembly steps and their associated precision problems.

Inventive Principle:
Principle #10Preliminary action

2Quantity of substance

If micro-LED dimensions are reduced for high density displays, then pixel density increases, but light-emitting area decreases

Engineering Contradiction:
Improvepixel densityVSAvoidlight-emitting area
Core Design Contradiction:
Quantity of substanceVSArea of moving object

Solution Approach 1:

The patent transitions from planar light emission to three-dimensional light emission by forming vertical sidewalls on the mesa structures. The light-emitting surface extends vertically along the sidewalls in addition to the top surface, effectively adding a vertical dimension to the light-emitting area. This allows smaller footprint devices to maintain or increase total light output area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nested structures by forming mesas with vertical sidewalls that contain additional light-emitting surfaces within the vertical profile. The light-emitting area is nested within the three-dimensional mesa structure, maximizing the use of available space within the device footprint while maintaining high pixel density.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Power

If thin film flip-chip design is used, then forward voltage and current drive capability improve, but dimensional down-scaling becomes difficult

Engineering Contradiction:
Improvecurrent drive capabilityVSAvoiddimensional scalability
Core Design Contradiction:
PowerVSAdaptability or versatility

Solution Approach 1:

The patent changes the structural parameters of the flip-chip design by forming vertical sidewalls and three-dimensional mesa structures. This parameter change allows the device to maintain the electrical performance benefits of flip-chip architecture while enabling dimensional down-scaling through optimized vertical profiles and reduced footprint configurations.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces dynamic adaptability by creating a modular mesa structure with vertical sidewalls that can be scaled in height and width independently. This dynamic structure allows the same flip-chip design to be adapted to various size requirements while maintaining electrical performance, making the design versatile across different device dimensions.

Inventive Principle:
Principle #15Dynamics

4Adaptability or versatility

If vertical thin film design is used, then dimensional down-scaling is easier, but forward voltage and brightness performance decrease

Engineering Contradiction:
Improvedimensional scalabilityVSAvoidbrightness
Core Design Contradiction:
Adaptability or versatilityVSPower

Solution Approach 1:

The patent merges the advantages of vertical thin film scalability with thin film flip-chip electrical performance by integrating vertical sidewall structures into the flip-chip architecture. The combined design achieves both easy dimensional down-scaling and high current drive capability, resolving the contradiction between scalability and brightness performance.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11955583B2Flip chip micro light emitting diodes
Publication Date: 2024.04.09 LUMILEDS SINGAPORE PTE LTD
  • US11955583B2 patent drawing
  • US11955583B2 patent drawing
  • US11955583B2 patent drawing

AI summary

A micro-light emitting diode (uLED) device comprises: a mesa comprising: a plurality of semiconductor layers including an n-type layer, an active layer, and a p-type layer; a p-contact layer contacting the p-type layer; a cathode contacting the first sidewall of the n-type layer; a first region of dielectric material that insulates the p-contact layer, the active layer, and a first sidewall of the p-type layer from the cathode; an anode contacting the top surface of the p-contact layer; and a second region of dielectric material that insulates the active layer, a second sidewall of the p-type layer, and the second sidewall of the n-type layer from the anode. The top surface of the p-contact layer has a different planar orientation compared to the first and second sidewalls of the n-type layer. Methods of making and using the uLED devices are also provided.