Floating-Gate Memory Doping Layout for Low-Voltage Programming

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Solution Overview

Problem

Existing nonvolatile memory devices require high programming voltages, which consume significant power and are inefficient, due to the need for strong electric fields to inject hot electrons into floating gates.

Innovation Solution

Incorporating a doped region between the source and drain, with a floating gate over a p-well in a substrate, enhances impact ionization and hot electron injection, allowing for lower programming voltages and increased threshold voltage windows through the use of n-doped sources and drains, as well as halo regions and doped silicon germanium regions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If high voltage is applied to create a strong electric field for hot electron injection, then programming efficiency is improved, but power consumption increases

Engineering Contradiction:
Improveprogramming efficiencyVSAvoidpower consumption
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The patent introduces a doped region with specific doping concentration (1E16 to 1E18 atoms/cm³) located between the source and drain, creating a localized area with enhanced impact ionization properties. This localized modification allows hot electron generation in a specific region without requiring high voltage across the entire device, thus improving programming efficiency while reducing overall power consumption.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent modifies the doping concentration parameter in the channel region by introducing a doped region with doping concentration between 1E16 to 1E18 atoms/cm³. This parameter change enhances impact ionization efficiency, allowing effective hot electron injection at lower voltages, thereby resolving the contradiction between programming efficiency and power consumption.

Inventive Principle:
Principle #35Parameter changes

2Productivity

If high voltage is used for programming, then hot electron injection is achieved, but device reliability deteriorates

Engineering Contradiction:
Improvehot electron injection efficiencyVSAvoiddevice reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

By creating a localized doped region between source and drain with specific doping characteristics, the patent confines the high electric field and hot electron generation to a small region. This prevents excessive stress on other device components, maintaining device reliability while achieving effective hot electron injection for programming.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The doped region acts as an intermediary structure that facilitates hot electron generation through enhanced impact ionization. It mediates between the applied voltage and the floating gate, enabling efficient electron injection without requiring high voltage that would compromise device reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Productivity

If a doped region is added between source and drain, then impact ionization is enhanced, but device complexity increases

Engineering Contradiction:
Improveimpact ionization efficiencyVSAvoiddevice structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The doped region is integrated into the existing transistor structure between the source and drain regions. By merging this additional functional element with the conventional device architecture, the patent achieves enhanced impact ionization without proportionally increasing overall device complexity. The doped region shares space and fabrication processes with existing structures.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves programming efficiency, reduces power consumption, and enhances device reliability by enabling hot electron injection with lower voltages and maintaining current through a channel with a lower doped p-well.

Implementation Method 1

the doped region enhances impact ionization and hot electron injection to the floating gate

Methodology Applied
Scientific EffectImpact ionization: Impact Force

Implementation Method 2

A strong vertically oriented electric field in a channel region between the source and the drain may be created resulting in injection of hot electrons to an edge portion of the floating gate from the channel region

Methodology Applied
Scientific EffectElectric field: Electric Field

Implementation Method 3

The n-well capacitor may be used to bias the floating gate through capacitive coupling as the floating gate is electrically insulated from external input nodes

Methodology Applied
Scientific EffectCapacitive coupling: Capacitance

Data Source

PatentUS11810982B2Nonvolatile memory device with a doped region between a source and a drain and integration schemes
Publication Date: 2023.11.07 GLOBALFOUNDRIES SINGAPORE PTE LTD
  • US11810982B2 patent drawing
  • US11810982B2 patent drawing
  • US11810982B2 patent drawing

AI summary

A nonvolatile memory device is provided. The nonvolatile memory device comprises an n-doped source, an n-doped drain, and a doped region in a first p-well in a substrate. A floating gate may be arranged over the first p-well, whereby the doped region may be arranged at least partially under the floating gate.