Fluid Control Block Assembly With Guide Alignment for Compact Maintenance
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Solution Overview
Problem
Existing fluid control systems for semiconductor manufacturing are too bulky and complex, leading to increased assembly time and reduced maintainability, while requiring higher flow rates to accommodate larger semiconductor wafers, necessitating a more compact and integrated design.
Innovation Solution
A fluid control system featuring upstream and downstream joining blocks with engaging parts and a support member, utilizing a guide part to constrain and align the blocks, reducing the need for bolts and enabling easier assembly and maintenance, with a single tightening bolt connecting the fluid device to each joining block, and an alignment mechanism to automatically position the blocks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If the fluid control system is made more compact and integrated, then the responsiveness is improved and the system can be installed closer to the chamber, but the assembly work becomes difficult and assembly man-hours increase
Solution Approach 1:
The fluid control system is divided into modular components: a support member with guide parts, joining blocks with engaging parts, and a fluid device. This segmentation allows each component to be manufactured independently and assembled through simple engagement of the guide and engaging parts, reducing assembly complexity despite the compact integrated design.
Solution Approach 2:
The guide part and engaging part act as intermediary elements that facilitate the connection between the support member and joining blocks. These intermediary structures enable easy assembly by providing a straightforward engagement mechanism that guides the joining blocks into proper alignment with the support member.
2Volume of moving object
If the fluid control system is made more compact and integrated, then the system size is reduced, but the maintainability deteriorates
Solution Approach 1:
The compact system maintains maintainability through segmentation into removable modules. The fluid device can be detached from the support member by reversing the engagement process, allowing maintenance or replacement of the fluid device without disassembling the entire compact system.
Solution Approach 2:
The fluid device is designed to be extractable from the compact integrated system. The joining block with engaging part allows the fluid device to be removed and replaced independently, maintaining ease of repair despite the compact overall system size.
3Quantity of substance
If the supply flow rate is increased to accommodate larger semiconductor wafers, then the processing capability is improved, but the system complexity increases
Solution Approach 1:
The joining block integrates multiple functions into a single component: it provides sealing around the flow path port, structural support for the fluid device, and mechanical engagement with the support member through the engaging part. This merging of functions increases supply flow rate capability without proportionally increasing system complexity.
Solution Approach 2:
The support member and joining block are designed as universal components that can accommodate different fluid devices and flow rates. The guide part and engaging part provide a standardized interface that works across different configurations, reducing overall system complexity despite increased flow rate requirements.
Data Source
AI summary
A screw hole of an upstream side joining block is formed only on an upstream side of a flow path port thereof in a longitudinal direction, a screw hole of a downstream side joining block is formed only on a downstream side of a flow path port thereof in the longitudinal direction and, between a guide part and an engaging part, an alignment mechanism aligns the positions of the upstream side and the downstream side joining blocks in a horizontal direction orthogonal to the longitudinal direction of the guide part to a center position of the guide part by using a portion of a reaction force that resists a bending force produced by the tightening force of a tightening bolt on a body and the upstream side and the downstream side joining blocks connected to each other.