Fluid-Sealed Heat Sink Plate Layout for Cooler Semiconductor Modules

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Solution Overview

Problem

Semiconductor modules face challenges in effectively dissipating the heat generated by power semiconductor elements, leading to excessive temperature increases due to inefficient thermal conduction.

Innovation Solution

Incorporating a heat sink plate with a sealed fluid inside, which enhances thermal conduction anisotropy and diffuses heat evenly across the substrate, while reducing impedance through terminal placement and using materials like copper or graphite for improved thermal conductivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a conventional substrate structure is used without specialized heat dissipation components, then the device complexity is low, but the temperature rise of semiconductor elements becomes excessive

Engineering Contradiction:
Improvetemperature rise of semiconductor elementVSAvoidstructure complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The substrate integrates multiple functions: it provides mechanical support, electrical insulation, and heat dissipation through an embedded heat sink plate. The heat sink plate is positioned in thermal contact with the semiconductor element's back surface, creating a unified structure that simultaneously supports and cools the device without requiring separate mounting components.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The heat sink plate acts as an intermediary between the semiconductor element and the external environment. It receives heat from the semiconductor element through thermal conduction and transfers it to the surrounding fluid or air, effectively mediating the heat transfer process and preventing excessive temperature rise in the semiconductor element.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Loss of energy

If heat is not effectively dissipated, then the device structure remains simple, but the thermal conduction efficiency becomes insufficient

Engineering Contradiction:
Improveheat dissipation efficiencyVSAvoidthermal conduction efficiency
Core Design Contradiction:
Loss of energyVSProductivity

Solution Approach 1:

The substrate's thermal properties are enhanced by incorporating a heat sink plate with high thermal conductivity material. This changes the thermal conduction parameter of the substrate, enabling more efficient heat transfer from the semiconductor element to the surrounding environment, thereby improving heat dissipation efficiency without complicating the overall device structure.

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If multiple semiconductor elements are mounted on a single substrate, then the device integration is high, but the heat dissipation capacity becomes insufficient

Engineering Contradiction:
Improvenumber of semiconductor elementsVSAvoidheat dissipation capacity
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The heat dissipation function is segmented from the mechanical support function. The heat sink plate is positioned specifically beneath the semiconductor element that generates the most heat, allowing targeted heat dissipation. This segmentation enables the substrate to support multiple semiconductor elements while providing dedicated thermal management for each high-power component.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively diffuses heat generated by semiconductor elements, suppresses temperature rise, and reduces impedance in the current path, enhancing cooling performance and maintaining control circuit functionality.

Implementation Method 1

enhances thermal conduction anisotropy and diffuses heat evenly across the substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A fluid is sealed inside the heat sink plate

Methodology Applied
Scientific EffectPhase change: Phase Change

Data Source

PatentUS12581951B2Semiconductor module having a plurality of heat sink plates
Publication Date: 2026.03.17 DENSO CORP
  • US12581951B2 patent drawing
  • US12581951B2 patent drawing
  • US12581951B2 patent drawing

AI summary

A semiconductor module includes a substrate, a semiconductor element and a heat sink plate. The substrate is included in a circuit board. The semiconductor element is disposed at the heat sink plate inside the substrate. A fluid is sealed inside the heat sink plate.