Fluid Sensor System for Nanoparticle Detection in Corrosive Environments
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Solution Overview
Problem
Current nanoparticle detectors are inefficient in detecting particles with densities less than 1,000 per cubic centimeter and are unreliable in corrosive environments, particularly when particle sizes are below 20 nm, leading to electrical and yield degradation in semiconductor IC device manufacturing.
Innovation Solution
A fluid sensor system with a particle detector that includes a substrate with a protection layer and membrane made of anti-corrosive materials, such as silicon carbide, and conductive layers to stabilize fluid pressure and detect nanoparticles in corrosive fluids, using a through via to count particles and prevent damage from corrosive chemicals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional nanoparticle detectors are used in corrosive environments, then particle detection capability is maintained, but the substrate is damaged by corrosive chemicals leading to electrical and yield degradation
Solution Approach 1:
A membrane is introduced as an intermediary layer between the substrate and the corrosive fluid. The membrane allows particles to pass through for detection while blocking corrosive chemicals from reaching the substrate, thus protecting the substrate from chemical damage while maintaining detection capability
Solution Approach 2:
The detector is constructed with composite materials including a substrate, a protection layer made of anti-corrosive material (such as silicon carbide), and a membrane. This composite structure provides both mechanical support and chemical resistance, enabling the detector to operate reliably in corrosive environments
2Measurement precision
If particle detection sensitivity is increased for small particles below 20 nm, then detection precision improves, but false detections increase due to electrical noise
Solution Approach 1:
The detector employs local quality enhancement by creating a controlled detection environment with stabilized fluid pressure and temperature. The membrane provides a uniform detection plane that reduces local variations in fluid dynamics, thereby minimizing electrical noise while maintaining sensitivity to small particles
Solution Approach 2:
The system changes operational parameters including fluid pressure stabilization and temperature control to optimize the detection environment. By carefully controlling these parameters, the system achieves high detection precision for particles below 20 nm while suppressing electrical noise through stabilized measurement conditions
3Measurement precision
If particle detection capability is maintained in low-density environments (less than 1,000 particles per cubic centimeter), then measurement precision is preserved, but detection efficiency decreases
Solution Approach 1:
The detection process is segmented into controlled stages with the membrane providing a defined detection zone. This segmentation allows for efficient particle counting by concentrating the detection effort in a specific region while maintaining the ability to detect low-density particle distributions accurately
4Object-affected harmful factors
If anti-corrosive protection layers are added to the substrate, then resistance to corrosive chemicals improves, but device complexity increases
Solution Approach 1:
The membrane used in the detector can be made with porous or semi-porous structure that allows particle passage while providing chemical protection. This porous material approach provides effective chemical resistance without requiring thick solid protection layers, thus minimizing the increase in device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively detects and counts nanoparticles in corrosive fluids, improving reliability and preventing substrate damage, thereby enhancing the quality and yield of semiconductor IC device manufacturing by accurately monitoring fluid quality.
Implementation Method 1
a membrane made of anti-corrosive materials... to stabilize fluid pressure
Implementation Method 2
conductive layers to stabilize fluid pressure and detect nanoparticles
Data Source
AI summary
The present disclosure provides a fluid sensor and a method for fabricating a fluid sensor. The fluid sensor includes a substrate having a first surface, a second surface opposite to the first surface and a recess recessed from the first surface, a protection layer over the first surface and lining the recess, wherein the protection layer includes a material different from that of the substrate, a first conductive layer over the first surface of the substrate and lining the protection layer in the recess, a membrane over the second surface of the substrate and contacting the first conductive layer and the protection layer at the second surface of the substrate, and a through via connected to the recess and penetrating the first conductive layer.