Fluid-Based Voltage Grading for Ion Beam Stability
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Solution Overview
Problem
Conventional resistive dividers in ion implanters face challenges with ballast current requirements and high electric field stress, particularly at low energy levels, leading to potential overheating and instability in voltage grading, which affects the precision and reliability of ion beam acceleration and deceleration.
Innovation Solution
A charged particle acceleration/deceleration system utilizing a fluid-based voltage grading system with adjustable resistance, comprising multiple fluid reservoirs and valves, allows for dynamic adjustment of electrical resistance to manage ballast current and voltage distribution across electrodes, using de-ionized water with additives to maintain stability and cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional resistive divider is used for voltage grading in wide range ion implantation, then the system can operate across a wide energy spectrum, but the system experiences overheating and instability at low energy levels due to insufficient ballast current
Solution Approach 1:
The patent applies dynamics by making the resistance value adjustable rather than fixed. The system transitions from a static resistive divider to a dynamic one where resistance can be changed based on operating conditions. This is achieved through fluid injection that alters the electrical resistance of the grading medium, allowing the system to adapt to different energy levels and maintain stability across the wide energy spectrum.
Solution Approach 2:
The patent changes the electrical resistance parameter of the voltage grading system by injecting conductive fluid into the resistive divider. This parameter change allows the system to provide sufficient ballast current at low energy levels while maintaining functionality across the wide energy spectrum. The resistance value is dynamically adjusted based on the operating energy level to prevent overheating and instability.
2Reliability
If the ballast current is increased to maintain voltage grading stability at low energy levels, then the system reliability improves, but the system generates excessive heat leading to overheating
Solution Approach 1:
The patent changes the resistance parameter dynamically based on operating conditions. At low energy levels where high ballast current is needed for stability, the system injects conductive fluid to lower resistance and provide sufficient current. At high energy levels where less current is needed, the system reduces fluid injection to maintain higher resistance, thereby reducing heat generation. This parameter adjustment resolves the contradiction between reliability and temperature.
Solution Approach 2:
The patent uses hydraulic principles by injecting conductive fluid into the resistive divider to alter its electrical properties. The fluid injection system allows dynamic control of resistance without mechanical moving parts in the high-voltage region. This hydraulic approach enables precise control of ballast current and heat generation, maintaining stability while managing temperature through fluid-based resistance adjustment.
3Productivity
If high energy ion implantation is used, then production yield and device performance improve, but the system requires complex beam optics and high voltage components
Solution Approach 1:
The patent applies universality by creating a voltage grading system that functions effectively across the entire energy spectrum from low to high levels. The adjustable resistive divider with fluid injection provides a single unified solution that replaces the need for different grading systems optimized for specific energy ranges. This multi-functional approach simplifies the overall system architecture while maintaining high energy implantation capabilities that improve production yield.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively manages ballast current and voltage distribution across a wide energy range, reducing overheating and maintaining system stability, thereby enhancing the precision and reliability of ion beam control in ion implantation processes.
Implementation Method 1
The fluid may have an electrical resistance... fluid-based voltage grading system with adjustable resistance... electrical resistance to manage ballast current and voltage distribution across electrodes
Implementation Method 2
reducing overheating and maintaining system stability... de-ionized water with additives to maintain stability and cooling
Data Source
AI summary
Techniques for controlling a charged particle beam are disclosed. In one particular exemplary embodiment, the techniques may be realized as a charged particle acceleration/deceleration system. The charged particle acceleration/deceleration system may comprise an accelerator column, which may comprise a plurality of electrodes. The plurality of electrodes may have apertures through which a charged particle beam may pass. The charged particle acceleration/deceleration system may also comprise a voltage grading system. The voltage grading system may comprise a first fluid reservoir and a first fluid circuit. The first fluid circuit may have conductive connectors connecting to at least one of the plurality of electrodes. The voltage grading system may further comprise fluid in the first fluid circuit. The fluid may have an electrical resistance.