Fluorescence Microscopy Inspection Using Incoherent Light
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Solution Overview
Problem
Current fluorescence microscopy inspection systems using coherent light sources are inadequate for detecting large features or specific layers in specimens, particularly patterned wafers, and fail to illuminate the entire field of view effectively, limiting their ability to create comprehensive specimen feature maps.
Innovation Solution
The development of a fluorescence microscopy inspection system utilizing incoherent light sources that emit specific wavelengths to excite specimens, combined with a brightfield and darkfield channel configuration, and advanced filtering mechanisms to direct and filter light, enabling the detection of features without fluorescence and generating detailed feature maps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If coherent light sources are used for fluorescence microscopy inspection, then the system can provide targeted excitation, but it fails to illuminate the entire field of view and cannot detect large features or features on patterned wafers effectively
Solution Approach 1:
The patent changes the fundamental parameter of light coherence from coherent to incoherent. Incoherent light sources emit light waves that are not synchronized in phase, allowing the entire field of view to be illuminated uniformly. This enables detection of large features and features on patterned wafers that were previously undetectable with coherent light sources, while maintaining sufficient excitation capability for fluorescence microscopy.
2Loss of information
If coherent light sources are used, then the system can provide focused illumination, but it only illuminates a small portion of the field of view, limiting comprehensive specimen feature mapping
Solution Approach 1:
The patent transitions from coherent to incoherent light sources, fundamentally changing the illumination parameter. Incoherent light naturally illuminates the entire field of view simultaneously, enabling comprehensive capture of all specimen features in a single field of view. This eliminates the need for multiple scans or stitching to create complete feature maps, thereby reducing information loss and improving inspection efficiency.
3Area of stationary object
If incoherent light sources are used to illuminate the entire field of view, then comprehensive feature detection is enabled, but the system must handle variable wavelengths to excite specific specimen layers
Solution Approach 1:
The patent introduces optical filters as intermediary components between the incoherent light source and the specimen. These filters selectively transmit specific wavelength ranges while blocking others, enabling targeted excitation of specific specimen layers or features. The filters act as mediators that reconcile the broad spectrum nature of incoherent light with the need for wavelength-specific excitation, maintaining system effectiveness without requiring complex wavelength tuning mechanisms.
Solution Approach 2:
The patent segments the broad spectrum of incoherent light into distinct wavelength ranges using multiple optical filters. Each filter is designed to transmit a specific wavelength range that corresponds to the excitation requirements of different specimen features or layers. This segmentation allows the system to selectively excite different features while maintaining uniform illumination across the entire field of view, effectively managing the complexity of variable wavelength requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system effectively excites specific layers of specimens, illuminates the entire field of view, and automatically detects features, providing comprehensive and accurate specimen feature maps, improving the inspection of both fluorescent and non-fluorescent characteristics.
Implementation Method 1
one or more incoherent light sources connected to the frame and configured to emit at least a first wavelength of light that will cause a specimen to fluoresce
Implementation Method 2
an excitation filter connected to the frame and configured to filter light from the one or more light sources, wherein the filtered light is configured to match a predetermined bandgap energy associated with the specimen
Implementation Method 3
an emission filter connected to the frame and configured for filtering selected wavelengths of light reflected from the specimen to a receiving camera
Implementation Method 4
a slider connected to the frame and positioned along a lightpath between the objective and the one or more incoherent light sources, wherein the slider includes at least one configuration configured to transmit light along the lightpath to at least a darkfield channel configured to direct light to the specimen at an oblique angle
Data Source
AI summary
A fluorescence microscopy inspection system includes light sources able to emit light that causes a specimen to fluoresce and light that does not cause a specimen to fluoresce. The emitted light is directed through one or more filters and objective channels towards a specimen. A ring of lights projects light at the specimen at an oblique angle through a darkfield channel. One of the filters may modify the light to match a predetermined bandgap energy associated with the specimen and another filter may filter wavelengths of light reflected from the specimen and to a camera. The camera may produce an image from the received light and specimen classification and feature analysis may be performed on the image.