Fluorinated Polymer Composition for Plasma-Resistant O-Ring Seals
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Solution Overview
Problem
In semiconductor manufacturing, the deterioration of O-rings containing silica as a filler material leads to foreign substances that cause process errors, necessitating an alternative material that provides mechanical properties and protects against oxygen-based plasma.
Innovation Solution
A novel polymer with a constitutional unit linked via a benzene ring, featuring a fluorine-containing side chain and Si-O bonds, which offers high affinity with fluorine-containing polymers and oxygen plasma resistance without compromising mechanical properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If silica is used as a filler material in O-rings, then mechanical properties are improved, but foreign substances are generated that cause process errors
Solution Approach 1:
The patent removes silica filler from the O-ring composition entirely, extracting the harmful element while maintaining mechanical properties through an alternative polymer formulation containing fluorine-containing side chains and Si-O bonds
Solution Approach 2:
The invention creates a composite polymer structure combining fluorine-containing side chains with siloxane backbone (Si-O bonds), achieving both mechanical strength and plasma resistance without requiring traditional silica filler
2Object-generated harmful factors
If alternative filler material is used to replace silica, then foreign substance generation is reduced, but mechanical properties may be compromised
Solution Approach 1:
The patent changes the chemical parameters of the polymer itself by incorporating fluorine-containing side chains and Si-O bonds, transforming the base material to achieve both mechanical strength and reduced foreign substance generation without relying on traditional fillers
3Reliability
If polymer protection against oxygen-based plasma is enhanced, then reliability in semiconductor manufacturing is improved, but material complexity increases
Solution Approach 1:
The patent applies local quality by introducing fluorine-containing side chains at specific positions on the polymer backbone, creating localized regions of high plasma resistance where needed while maintaining overall material simplicity and processability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polymer composition provides excellent mechanical properties and oxygen plasma resistance, making it suitable for use in semiconductor manufacturing applications, such as seals for devices requiring high cleanliness and resistance to plasma exposure.
Implementation Method 1
featuring a fluorine-containing side chain and Si-O bonds, which offers high affinity with fluorine-containing polymers
Implementation Method 2
provides both mechanical properties and protection against oxygen-based plasma
Data Source
AI summary
The invention provides a novel polymer, a composition, and a molded article. The polymer contains a constitutional unit represented by the following formula (1): wherein X11 and X12 are the same as or different from each other, and are each a hydrogen atom, an alkyl group optionally containing a fluorine atom, or a phenyl group; Y11 is an oxygen atom or a sulfur atom; Rf11 is a hydrogen atom or an alkyl group optionally containing a fluorine atom; and a is an integer of 1 to 4.