Fluorine-Containing Composition for Organic Thin Film Patterning

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Solution Overview

Problem

Existing methods for modifying substrate surfaces for organic thin film formation, such as using photodegradable silane coupling agents, do not adequately improve the characteristics of organic thin films, particularly in terms of hydrophilicity and water repellency, which are crucial for forming high-quality patterns and transistors.

Innovation Solution

A fluorine-containing composition comprising a fluorine-containing compound and a fluorine-based solvent is used to chemically modify substrate surfaces, creating a photodegradable coupling agent that forms hydrophilic and water-repellent regions upon exposure to light, allowing for the selective patterning of materials and improved organic thin film formation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If photodegradable silane coupling agents are used to modify substrate surfaces, then contact angle change is achieved, but organic thin film characteristics are not adequately improved

Engineering Contradiction:
Improvepattern formation qualityVSAvoidorganic thin film characteristics
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention changes the chemical composition parameters of the coupling agent by incorporating fluorine-containing compounds with specific molecular structures (containing photodegradable groups, silane groups, and fluorinated hydrocarbon groups) to improve both pattern formation quality and organic thin film characteristics simultaneously

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a composite coupling agent structure combining multiple functional groups (photodegradable groups, silane groups, fluorinated hydrocarbon groups) within a single molecular framework to achieve multiple functions: surface modification, photodegradability for patterning, and improvement of organic thin film characteristics

Inventive Principle:
Principle #40Composite materials

2Reliability

If conventional surface modification methods are used, then substrate surface characteristics are modified, but wettability and crystallinity of organic semiconductor materials are not enhanced

Engineering Contradiction:
Improvewettability and crystallinityVSAvoidsurface modification process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The invention modifies the chemical parameters of the surface treatment by using fluorine-containing compounds that provide specific interactions with organic semiconductor materials, thereby enhancing wettability and promoting crystallinity while maintaining process simplicity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The fluorine-containing coupling agent acts as an intermediary layer between the substrate and organic semiconductor materials, providing improved wettability and crystallinity promotion without complicating the manufacturing process

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If photodegradable coupling agents are used for pattern formation, then hydrophilic and water-repellent regions are created, but selectivity in material patterning is insufficient

Engineering Contradiction:
Improvematerial patterning selectivityVSAvoidpatterning process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The invention creates distinct local surface properties by forming self-assembled monolayers with fluorinated hydrocarbon groups that provide strong water repellency in treated regions, while unexposed regions remain hydrophilic, thereby enhancing selectivity for material patterning

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The invention changes the surface energy parameters through photodegradation of the coupling agent, creating regions with dramatically different wettability characteristics that improve selectivity for selective material deposition

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The fluorine-containing composition enhances the wettability and crystallinity of organic semiconductor materials, leading to improved electrical connections and mobility, and enables the formation of high-quality patterns and transistors with reduced surface roughness and increased selectivity in material patterning.

Implementation Method 1

a self-assembled monolayer (SAM) in which a monomolecular film composed of highly ordered organic molecules is formed by self-assembly

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Implementation Method 2

organic molecules are used that have as a terminal group thereof a functional group that forms a prescribed chemical bond with a prescribed substrate

Methodology Applied
Scientific EffectChemical bonding: Chemical Bonding

Implementation Method 3

a photodegradable silane coupling agent... by making a considerable change in the contact angle before and after irradiating with light

Methodology Applied
Scientific EffectPhotodegradation: Photodissociation

Data Source

PatentUS10466591B2Fluorine-containing composition, substrate for pattern formation, photodegradable coupling agent, pattern formation method and transistor production method
Publication Date: 2019.11.05 NIKON CORP
  • US10466591B2 patent drawing
  • US10466591B2 patent drawing
  • US10466591B2 patent drawing

AI summary

Disclosed is a fluorine-containing composition containing a fluorine-containing compound represented by general formula (1) and a fluorine-based solvent.