Fluorine Gradient Resin Mold for Nanoimprint
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Solution Overview
Problem
Current resin molds for nanoimprint techniques lack adhesion to substrates and release properties, limiting their durability and repetition transfer capabilities, especially when used with transfer materials.
Innovation Solution
A resin mold with a fluorine element concentration higher on the surface than in the bulk, optimized by the ratio of surface fluorine concentration to bulk concentration, enhances adhesion and release properties, allowing for repeated transfer of nanometer-scale concavo-convex shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If resin molds are used for nanoimprint, then flexibility and versatility are improved, but adhesion to substrate and release properties deteriorate
Solution Approach 1:
The patent applies local quality by creating a fluorine concentration gradient within the resin mold structure. The surface layer contains high fluorine concentration (5-20 at%) for release properties, while the bulk maintains lower fluorine concentration (1-5 at%) for adhesion and mechanical strength. This spatial differentiation of composition allows the single resin mold material to simultaneously provide both release and adhesion functions in different regions.
2Adaptability or versatility
If resin molds are used for nanoimprint, then flexibility and versatility are improved, but release properties from transfer material deteriorate
Solution Approach 1:
The patent employs parameter changes by systematically varying the fluorine concentration parameter within the resin mold. By controlling the fluorine content gradient from surface to bulk, the surface free energy parameter is optimized for release properties. The high surface fluorine concentration creates low surface free energy that prevents adhesion between the mold and transfer material, enabling reliable release after patterning.
3Ease of manufacture
If resin molds are used for nanoimprint, then manufacturing cost is reduced, but durability and repetition transfer capabilities deteriorate
Solution Approach 1:
The patent creates a composite material structure within the resin mold by combining resin components with different fluorine contents. This internal composite structure provides both the low-cost advantage of resin molds and the durability of structured materials. The fluorine-rich surface layer protects the bulk material from degradation during repeated use, enhancing mold lifetime while maintaining cost-effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resin mold exhibits improved adhesion to substrates, enhanced release properties, and increased durability, enabling efficient and cost-effective repetition transfer of nanometer-scale patterns, reducing the need for expensive master stamper costs.
Implementation Method 1
a fluorine element concentration (Es) in a surface portion of the resin mold is an average fluorine element concentration (Eb) in the resin forming the resin mold or more
Data Source
AI summary
To provide a resin mold which is excellent in adhesion to a substrate, excellent in release properties from a transfer material resin, further excellent in durability of the resin mold itself, and which endures repetition transfer to the transfer material resin, a resin mold of the invention is a resin mold having a fine concavo-convex structure on the surface, and is characterized in that the fluorine element concentration (Es) in a resin mold surface portion is the average fluorine element concentration (Eb) in the resin forming the resin mold or more.