Fluorine Rubber Seal Composition for Plasma Bleed-Out Control
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Solution Overview
Problem
Existing fluorine rubber compositions used in semiconductor production apparatus seals suffer from bleeding-out of compounds with perfluoropolyether skeletons under plasma exposure, leading to reduced plasma resistance and potential particle deposition.
Innovation Solution
A fluorine rubber composition comprising a hydrogen-containing fluorine rubber as a main component, a compound with a perfluoropolyether skeleton containing an alkenyl group, and a powdery filler with a bulk density of 0.4 g/cm³ or less, where the volume of the filler is significantly larger than the compound, enhancing plasma resistance by reducing bleeding-out and minimizing filler deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a compound having a perfluoropolyether skeleton is added to enhance plasma resistance, then plasma resistance is improved, but the compound bleeds out from the seal under plasma exposure
Solution Approach 1:
The patent combines the perfluoropolyether skeleton compound with a fluorine-containing polymer matrix to form a composite seal material. The polymer matrix acts as a restraining structure that prevents the liquid compound from bleeding out while allowing it to provide plasma resistance functionality.
Solution Approach 2:
The patent optimizes the concentration of the perfluoropolyether skeleton compound within a specific range (0.1-10 mass%) to balance plasma resistance enhancement with prevention of bleeding-out. This parameter optimization ensures the compound remains effective without excessive migration.
2Reliability
If a powdery filler is added to the composition, then plasma resistance and durability are improved, but filler deposition may occur under plasma exposure
Solution Approach 1:
The patent specifies a bulk density parameter for the powdery filler (0.1-0.5 g/cm³) to optimize its performance. This density control ensures the filler provides sufficient plasma resistance while minimizing excessive deposition under plasma exposure conditions.
Solution Approach 2:
The patent distributes the powdery filler uniformly throughout the fluorine rubber composition to ensure consistent plasma resistance properties while preventing localized accumulation that could lead to harmful deposition.
3Reliability
If the volume of powdery filler is increased to enhance plasma resistance, then plasma resistance is improved, but filler deposition increases
Solution Approach 1:
The patent optimizes the concentration of powdery filler within a specific range to achieve sufficient plasma resistance while controlling deposition. The bulk density parameter (0.1-0.5 g/cm³) serves as a critical control parameter to balance these competing requirements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition maintains excellent plasma resistance with reduced mass loss and minimal filler deposition, ensuring high durability and performance in plasma environments.
Implementation Method 1
a component C that is a powdery filler having a bulk density of 0.4 g/cm3 or less, wherein a volume of the component C is 10 times or more a volume of the component B
Data Source
AI summary
A fluorine rubber composition contains a component A that is a base rubber containing a hydrogen-containing fluorine rubber as a main component, a component B that is a compound having a perfluoropolyether skeleton, and a component C that is a powdery filler having a bulk density of 0.4 g/cm3 or less. A part or whole of the component B contains an alkenyl group in a molecule. (pC/dC)/(pB/dB) ≥ 4 is satisfied wherein dB is a density of the component B, pB is a content of the component B relative to 100 parts by mass of the component A, de is the bulk density of the component C, and pc is a content of the component C relative to 100 parts by mass of the component A.