Fluoroelastomer Sealing Composition With High 100% Mo in Plasma
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Solution Overview
Problem
Conventional sealing materials used in applications like semiconductor manufacturing, particularly in plasma atmospheres, face challenges with low tensile stress at 100% elongation and lack of fillers, which affect their performance in terms of hardness, tensile strength, and plasma resistance.
Innovation Solution
An elastomer composition comprising a crosslinkable fluoroelastomer, an ethylenically unsaturated bond-containing compound, a crosslinking agent, and a crosslinking aid, with a specific mass ratio of the crosslinking aid to the crosslinking agent, and minimal filler content, which is radiation-crosslinked to enhance mechanical properties and plasma resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If no filler or small amount of filler is added to the sealing material, then plasma resistance is maintained, but tensile stress at 100% elongation is insufficient
Solution Approach 1:
The patent changes the chemical composition parameters by introducing specific compounds: perfluoroalkyl vinyl ether units (5-30 mol%) and silane-modified fluoroelastomer units (10-50 mol%). These compositional changes enable the material to achieve both high plasma resistance and high tensile stress at 100% elongation without requiring traditional fillers, thus resolving the technical contradiction between plasma resistance and mechanical strength.
2Stability of the object's composition
If conventional crosslinking methods are used, then crosslinking occurs, but 100% Mo (tensile stress at 100% elongation) remains low
Solution Approach 1:
The patent creates a composite crosslinked structure by combining fluoroelastomer chains with perfluoroalkyl vinyl ether units and silane-modified fluoroelastomer units. This composite material approach, combined with specific crosslinking agents and radiation crosslinking, produces a network structure that simultaneously achieves stable crosslinking and high 100% Mo values exceeding 4.0 MPa.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution results in a sealing material with improved hardness, tensile strength, and 100% Mo values, while maintaining excellent plasma resistance and crack resistance, making it suitable for semiconductor and plasma processing applications.
Implementation Method 1
A sealing material that is a radiation-crosslinked body of the elastomer composition
Data Source
AI summary
One embodiment of the present invention relates to an elastomer composition, a sealing material, or a method for producing a sealing material, in which the elastomer composition includes a crosslinkable fluoroelastomer (A) other than a perfluoroelastomer, an ethylenically unsaturated bond-containing compound (B), a crosslinking agent (C), and a crosslinking aid (D), the ethylenically unsaturated bond-containing compound (B) contains at least one selected from compounds having a perfluoro skeleton having an ethylenically unsaturated bond and compounds having a siloxane skeleton having an ethylenically unsaturated bond, and a mass ratio of a content of the crosslinking aid (D) to the crosslinking agent (C) is 5 or more.