Foaming Adhesive Sheet for Backgrinding Hard Brittle Substrates

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Solution Overview

Problem

The existing methods for grinding hard and brittle substrates, such as sapphire or silicon carbide, face challenges with high frictional resistance, reduced pressure-sensitive adhesive strength due to frictional heat, and contamination issues from adhesive residues.

Innovation Solution

A pressure-sensitive adhesive sheet with a pressure-sensitive adhesive layer containing a base polymer, such as a thermoplastic elastomer, and a foaming agent with a foaming temperature of 90° C. or more, ensuring a shear adhesive strength of 1.0 MPa or more at 25° C. and 0.2 MPa or more at 80° C.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a pressure-sensitive adhesive sheet is used to fix the hard and brittle substrate during high-load grinding, then productivity and contamination property are improved, but the pressure-sensitive adhesive strength is reduced due to frictional heat, resulting in insufficient fixing

Engineering Contradiction:
ImproveproductivityVSAvoidfixing property
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent changes the physical and chemical parameters of the pressure-sensitive adhesive by incorporating a foaming agent that activates at high temperature. The adhesive transitions from a dense state at room temperature to a foamed state during heating, altering its mechanical properties to maintain adhesive strength under frictional heat conditions while preserving fixing capability during grinding.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The foaming agent undergoes a phase transition from solid to gas when heated during the grinding process. This phase transition creates foam within the adhesive layer, which helps dissipate frictional heat and maintains the adhesive's fixing property despite the high-temperature conditions generated during high-load grinding of hard and brittle substrates.

Inventive Principle:
Principle #36Phase transitions

2Reliability

If a pressure-sensitive adhesive sheet with strong adhesive property under high temperature is used, then fixing property is improved, but peel strength increases and adhesive residue occurs, requiring cleaning of the substrate

Engineering Contradiction:
Improvefixing propertyVSAvoidadhesive residue
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent utilizes parameter changes by selecting a foaming agent with a specific activation temperature range. During grinding, the adhesive remains in a non-foamed state with strong adhesive properties. After grinding, when heated to the foaming temperature, the adhesive foams and its properties change, enabling easy peeling without residue. This parameter change resolves the contradiction between strong fixing during grinding and easy removal afterward.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If wax is used as a fixing material for grinding hard and brittle substrate, then fixing property is improved, but cleaning step with large amount of solvent is required, worsening contamination property and productivity

Engineering Contradiction:
Improvefixing propertyVSAvoidproductivity
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The patent employs a disposable pressure-sensitive adhesive sheet that performs the fixing function during grinding and then is easily removed without requiring solvent cleaning. The adhesive sheet is designed to be used once and discarded, eliminating the need for time-consuming cleaning steps with solvents, thereby improving productivity while maintaining effective fixing during the grinding process.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent replaces the traditional wax-based mechanical fixing system with a pressure-sensitive adhesive system. This substitution eliminates the need for solvent-based cleaning processes, as the adhesive sheet can be easily peeled off without residue, thereby improving both contamination property and productivity while maintaining fixing effectiveness.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The pressure-sensitive adhesive sheet provides excellent grinding accuracy, low contamination, high productivity, and effective fixing properties for hard and brittle substrates during the backgrinding process, while allowing easy peeling after grinding without the need for solvent cleaning.

Implementation Method 1

a foaming agent having a foaming temperature of 90° C. or more

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 2

extremely large frictional resistance occurs between the body to be ground (hard and brittle substrate) and the grinder, resulting in a reduction in pressure-sensitive adhesive strength of the pressure-sensitive adhesive sheet due to frictional heat

Methodology Applied
Scientific EffectFrictional heating: Viscous Heating

Data Source

PatentUS12286569B2Adhesive sheet
Publication Date: 2025.04.29 NITTO DENKO CORP
  • US12286569B2 patent drawing

AI summary

Provided is a pressure-sensitive adhesive sheet that may be used for the grinding of a hard and brittle substrate in a backgrinding step for the hard and brittle substrate, the pressure-sensitive adhesive sheet being excellent in all of grinding accuracy, low contamination property, productivity, and fixing property. The pressure-sensitive adhesive sheet of the present invention includes a pressure-sensitive adhesive layer, wherein the pressure-sensitive adhesive layer contains: a pressure-sensitive adhesive containing a base polymer; and a foaming agent having a foaming temperature of 90° C. or more, and wherein the pressure-sensitive adhesive sheet has, when a pressure-sensitive adhesive surface thereof is bonded to a silicon chip, a shear adhesive strength of 1.0 MPa or more under an ambient temperature of 25° C., and a shear adhesive strength of 0.2 MPa or more under an ambient temperature of 80° C.