End Effector Carrier for Focus Ring Transport
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Solution Overview
Problem
In semiconductor manufacturing, the focus ring is often etched along with the substrate during processes, leading to increased etching amounts and the need for frequent replacement, which complicates the transport and handling of ring-shaped members like the focus ring.
Innovation Solution
A carrier for the end effector with vacuum holes and support blocks that allows for the easy transportation of ring-shaped members by creating a negative pressure environment, enabling the carrier to support and transport consumable parts like the focus ring in a manner similar to substrates, using a hand with vacuum holes and support blocks that communicate with the vacuum holes to maintain the consumable part in place.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the focus ring is etched together with the substrate during substrate processing, then the substrate processing can be performed continuously, but the etching amount of the focus ring increases and frequent replacement is required
Solution Approach 1:
The focus ring is separated from the substrate processing path and placed on a dedicated carrier for separate transport and replacement, allowing the substrate processing to continue without interruption while the focus ring can be independently managed and replaced only when necessary
2Ease of operation
If the focus ring is transported using a dedicated handling mechanism, then the transport of ring-shaped members can be improved, but the device complexity increases
Solution Approach 1:
The end effector hand is designed to handle both substrates and carriers universally using the same vacuum suction mechanism. The carrier incorporates vacuum holes that communicate with the end effector's vacuum system, allowing the same end effector to transport both substrates and focus rings without requiring separate handling mechanisms, thereby reducing device complexity while maintaining ease of operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates the efficient and simple transportation of ring-shaped members, reducing the need for frequent replacements and improving the handling process by using a carrier that matches the transport operation of substrates, thus simplifying the logistics and maintenance in semiconductor processing.
Implementation Method 1
an inner space communicating with the vacuum hole is installed in the plurality of support blocks, and the inner space is evacuated by negative pressure provided from the plurality of vacuum holes
Data Source
AI summary
The transporting apparatus of the present invention comprises an end effector including a hand and a plurality of vacuum holes installed in the hand; and a carrier located on the hand and for supporting a consumable part, wherein the carrier comprises one side for supporting a consumable part, the other surface facing the hand of the end effector, and a plurality of support blocks installed on the other surface and corresponding to the plurality of vacuum holes, wherein an inner space communicating with the vacuum hole is installed in the plurality of support blocks, and the inner space is evacuated by negative pressure provided from the plurality of vacuum holes.