Bottom Electrode Focus Ring Assembly for In-Chamber Replacement
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Solution Overview
Problem
Conventional plasma processing apparatuses require manual opening of the process chamber for focus ring replacement, increasing maintenance intensity and deteriorating operating performance.
Innovation Solution
A bottom electrode assembly with a drive device-activated moving block system that lifts and removes the focus ring without opening the process chamber, utilizing a robot arm to install a new focus ring, maintaining the vacuum environment and enhancing operational efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If manual opening of the process chamber is used for focus ring replacement, then the focus ring can be replaced, but the work intensity of maintenance staff increases and operating performance deteriorates
Solution Approach 1:
The focus ring is extracted from the process chamber through a dedicated opening in the chamber wall, allowing replacement without opening the main process chamber. This separates the maintenance operation from the production environment, enabling focus ring replacement while maintaining vacuum and continuous operation.
Solution Approach 2:
A robot arm serves as an intermediary device to handle the focus ring replacement operation. The robot arm transfers the focus ring through the chamber wall opening, eliminating the need for manual entry into the chamber and reducing work intensity while maintaining operating performance.
2Ease of repair
If manual opening of the process chamber is used for focus ring replacement, then the focus ring can be replaced, but the vacuum environment is disrupted
Solution Approach 1:
The focus ring is extracted through a dedicated opening in the chamber wall rather than opening the main chamber. This allows the vacuum environment to be maintained while still enabling focus ring replacement through the localized opening that can be sealed when not in use.
Solution Approach 2:
The process chamber is designed with a pre-configured opening and sealing mechanism specifically for focus ring replacement. This preliminary preparation enables maintenance operations without compromising the vacuum environment, as the opening can be sealed when not in use.
3Device complexity
If the focus ring is fixed in position, then the structure is simple, but the focus ring cannot be replaced without opening the chamber
Solution Approach 1:
The focus ring is designed with movable capability through the chamber wall opening. The dynamic positioning system allows the focus ring to be transferred in and out of the chamber while maintaining a relatively simple overall structure. The moving blocks with steps provide controlled movement without complex mechanisms.
Data Source
AI summary
Disclosed are a bottom electrode assembly, a plasma processing apparatus, and a method of replacing a focus ring, wherein the bottom electrode assembly comprises: a base for supporting a wafer to be processed; a focus ring provided surrounding the outer periphery of the base; a cover ring disposed beneath the focus ring, a plurality of recesses being arranged along the circumferential direction of the cover ring; moving blocks provided in the recesses, an inner top corner of each moving block being provided with a step, the step being configured to support part of the focus ring; and a drive device connected to the moving blocks to activate the moving blocks to drive the focus ring to move up and down. With the bottom electrode assembly, replacement of the focus ring can be performed without opening the process chamber.