Fourier Image Resonator for Multipass Electron Microscopy Aberration Correction

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Solution Overview

Problem

Conventional electron microscope designs are inadequate for multipass electron microscopy due to accumulated aberrations, which limit the imaging quality and specimen damage from high electron doses required for low-scattering biological specimens.

Innovation Solution

The implementation of a Fourier image resonator configuration in multipass electron microscopy, which allows for simultaneous correction of spherical and chromatic aberrations by positioning the sample or using compensating elements, enabling improved aberration correction and reduced specimen damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If conventional electron microscope designs are used for multipass electron microscopy, then the imaging can be performed with simple design, but aberrations accumulate with each round trip limiting imaging quality

Engineering Contradiction:
Improvemicroscope design simplicityVSAvoidimaging quality
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The system divides the correction function into separate correctors for spherical aberration and chromatic aberration. Each corrector is independently adjustable, allowing precise control over aberration compensation without requiring complete redesign of the entire microscope system.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The aberration correctors are made dynamically adjustable during operation, enabling real-time compensation for accumulated aberrations across multiple electron passes. This dynamic adjustment maintains imaging quality without requiring fixed, complex optical paths.

Inventive Principle:
Principle #15Dynamics

2Measurement precision

If high electron doses are used to image low-scattering biological specimens, then imaging signal is improved, but specimen damage increases

Engineering Contradiction:
Improveimaging signal qualityVSAvoidspecimen damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The multipass configuration allows continuous accumulation of imaging signal across multiple electron passes through the specimen. By maintaining coherent electron waves that repeatedly interact with the same specimen region, the system achieves high signal quality without requiring proportionally high electron doses that would cause damage.

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The system uses aberration correctors that provide feedback compensation for distortions accumulated during multiple passes. This active correction maintains image quality across passes, allowing lower electron doses to achieve the same effective signal-to-noise ratio that would otherwise require higher damaging doses.

Inventive Principle:
Principle #23Feedback

3Ease of operation

If real image resonator configuration is used, then the sample is reimaged with +1 magnification naturally, but only chromatic aberration can be corrected

Engineering Contradiction:
Improvereimaging simplicityVSAvoidaberration correction capability
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The correction system is segmented into independent spherical and chromatic aberration correctors. This segmentation allows the real image resonator to maintain its natural +1 magnification property while adding targeted correction capabilities for both types of aberrations without disrupting the fundamental imaging geometry.

Inventive Principle:
Principle #1Segmentation

4Manufacturing precision

If Fourier image resonator configuration is used, then both spherical and chromatic aberrations can be corrected simultaneously, but the sample is reimaged with -1 magnification requiring compensation

Engineering Contradiction:
Improveaberration correction capabilityVSAvoidreimaging configuration
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system accepts the -1 magnification inversion inherent to Fourier image resonators and compensates for it by positioning the specimen at a specific location or adding a second inversion stage. This approach prioritizes superior aberration correction while managing the inversion through straightforward positional or optical compensation rather than attempting to eliminate the fundamental Fourier transform relationship.

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances imaging resolution and sensitivity while reducing specimen damage by effectively correcting aberrations and maintaining high-quality imaging across multiple passes, achieving an order-of-magnitude reduction in damage at equivalent resolution.

Implementation Method 1

Fourier images of the sample are at each of the mirror reflection planes

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

Aberrations from the electron objective lenses typically dominate in designs

Methodology Applied
Scientific EffectSpherical aberration:

Implementation Method 3

simultaneous correction of the lowest order spherical and chromatic aberrations of the electron objective lenses

Methodology Applied
Scientific EffectChromatic aberration:

Implementation Method 4

an electron resonator is configured to reimage the sample onto itself as electrons make round trips in the resonator

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS11456148B2Aberration reduction in multipass electron microscopy
Publication Date: 2022.09.27 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIV
  • US11456148B2 patent drawing
  • US11456148B2 patent drawing
  • US11456148B2 patent drawing

AI summary

Improved aberration correction in multipass electron microscopy is provided by having Fourier images of the sample (instead of real images) at the reflection planes of the resonator. The resulting −1 magnification of the sample reimaging can be compensated by appropriate sample placement or by adding compensating elements to the resonator. This enables simultaneous correction of lowest order chromatic and spherical aberration from the electron objective lenses. If real images of the sample are at the reflection planes of the resonator instead, only the lowest order chromatic aberration can be corrected.