Fumed Silica Single Aggregate Separation via Aerosol Electric Field
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Solution Overview
Problem
Current methods fail to effectively separate and classify single aggregates from fumed silica, which are crucial for analyzing abrasive performance in semiconductor manufacturing, due to strong aggregation and surface hydrogen bonding.
Innovation Solution
A method involving the preparation of a slurry with fumed silica dispersed in water, aerosolization, and collection using an electric field, followed by shape classification through an algorithm analyzing aspect ratio, roundness, and solidity of the single aggregates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If fumed silica is used as abrasive particles for CMP, then polishing performance is improved, but particles aggregate strongly forming secondary and tertiary particles making separation difficult
Solution Approach 1:
The invention segments the aggregated fumed silica particles into individual single aggregates through controlled dispersion. The slurry preparation and aerosolization processes break down the complex aggregated structures (tertiary particles) into separable units (single aggregates), allowing them to be treated and collected individually while maintaining their polishing functionality.
Solution Approach 2:
The invention introduces water as an intermediary medium to disperse the aggregated silica particles. The slurry system acts as an intermediary state between the aggregated powder and the separated single aggregates, enabling controlled separation through aerosolization and electric field application without directly manipulating the strongly bonded particles.
2Ease of manufacture
If conventional separation methods are used, then processing is simple, but single aggregates cannot be effectively separated from aggregated particles
Solution Approach 1:
The invention replaces conventional mechanical separation methods with an electric field-based separation system. By aerosolizing the slurry and applying electric fields, the system achieves precise separation of single aggregates from aggregated particles based on their electrical properties, overcoming the limitations of mechanical methods that cannot effectively separate strongly bonded particles.
Solution Approach 2:
The invention changes the physical state parameters of the silica particles by converting them from a dry powder state to an aerosolized slurry state. This parameter change enables the particles to be separated individually through the electric field, as the aerosolized state reduces inter-particle bonding while maintaining particle integrity.
3Loss of time
If aggregates are not separated, then processing time is reduced, but shape classification and performance analysis become impossible
Solution Approach 1:
The invention performs preliminary separation of single aggregates from aggregated particles before the classification and analysis steps. By pre-separating the particles using aerosolization and electric field methods, the system prepares the material in a ready-to-analyze state, enabling subsequent rapid shape classification and performance evaluation without time-consuming manual separation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method allows for the effective separation and classification of single aggregates, enabling performance analysis and guiding the manufacturing process to achieve desired shapes, thereby improving abrasive quality and reducing surface scratches.
Implementation Method 1
collecting single aggregates of the finned silica in the aerosol using an electric field
Data Source
AI summary
The present invention relates to a method for separating and collecting single aggregates from fumed silica, and a method for classifying a shape of the collected single aggregates, and more specifically, includes preparing a slurry in which fumed silica is dispersed in water; aerosolizing the slurry; and collecting single aggregates of the finned silica in the aerosol using the electric field.