Heat Treatment Furnace Insulation with Compressed Silica

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Solution Overview

Problem

Conventional heat treatment furnaces face challenges in efficiently preventing heat loss while maintaining a reasonable thickness of the heat insulating member, leading to increased manufacturing costs and poor temperature control due to the use of bulk insulating materials and metal vacuum vessels with poor heat resistance.

Innovation Solution

A heat treatment furnace design incorporating an inner and outer heat insulating member, where the outer member is made of finely-powdered compressed silica material covered with an anti-scattering layer, allowing for improved insulation without increasing the total thickness and preventing material scattering.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If the layer thickness of the heat insulating member is increased to prevent heat loss, then heat insulation efficiency is improved, but the total thickness increases and temperature increase/decrease performance deteriorates

Engineering Contradiction:

Improveheat lossVSAvoidtotal thickness of heat insulating member

Core Design Contradiction:

Loss of energyVSLength of stationary object

Solution Approach 1:

The heat insulating member is constructed as a composite structure with an inner heat insulating member made of inorganic fiber material and an outer heat insulating member made of finely-powdered compressed silica material. This composite configuration allows the outer member to provide superior insulation performance with reduced thickness compared to conventional single-material structures, thereby preventing heat loss while maintaining a controlled total thickness.

Inventive Principle:

Principle #40Composite materials

2Loss of energy

If the layer thickness of the heat insulating member is increased to prevent heat loss, then heat insulation efficiency is improved, but temperature increase/decrease performance deteriorates requiring increased heater capacity

Engineering Contradiction:

Improveheat lossVSAvoidtemperature increase/decrease performance

Core Design Contradiction:

Loss of energyVSProductivity

Solution Approach 1:

The outer heat insulating member made of finely-powdered compressed silica material provides high insulation efficiency with a thinner profile, reducing the thermal mass that would otherwise slow down temperature changes. This allows the system to achieve effective heat loss prevention while maintaining rapid temperature response characteristics.

Inventive Principle:

Principle #40Composite materials

3Loss of energy

If a heat insulating vacuum member with metal vacuum vessel is used to enhance insulation property, then heat insulation efficiency is improved, but heat resistance becomes poor and cannot be used under high temperatures

Engineering Contradiction:

Improveheat lossVSAvoidheat resistance

Core Design Contradiction:

Loss of energyVSReliability

Solution Approach 1:

The outer heat insulating member is made of finely-powdered compressed silica material, which is a porous ceramic material capable of withstanding high temperatures. This material provides effective heat insulation through its porous structure while maintaining excellent heat resistance, eliminating the need for metal vacuum vessels that would be required for high-temperature applications.

Inventive Principle:

Principle #31Porous materials

4Loss of energy

If a bulk heat insulating vacuum member is used to enhance insulation property, then heat insulation efficiency is improved, but weight increases and manufacturing cost increases

Engineering Contradiction:

Improveheat lossVSAvoidweight of heat insulating member

Core Design Contradiction:

Loss of energyVSWeight of stationary object

Solution Approach 1:

The heat insulating member is constructed as a composite structure with an inner member made of inorganic fiber material and an outer member made of finely-powdered compressed silica material. This composite configuration achieves superior insulation performance with reduced material quantity, thereby reducing both weight and manufacturing cost compared to bulk heat insulating vacuum members.

Inventive Principle:

Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances heat insulation efficiency while maintaining a controlled thickness, reducing heat loss and manufacturing costs, and allows for effective thermal management during high-temperature processes.

Implementation Method 1

The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered

Methodology Applied

Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 2

at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered

Methodology Applied

Scientific EffectPhysical containment: Physical Containment

Data Source

PatentUS8957352B2Heat treatment furnace and heat treatment apparatus

Publication Date: 2015.02.17 TOKYO ELECTRON LTD

AI summary

Provided is a heat treatment furnace, which includes a processing vessel configured to accommodate at least one object to be processed, a heat insulating member configured to cover a periphery of the processing vessel, and a heating unit configured to be arranged along an inner peripheral surface of the heat insulating member. The heat insulating member includes an inner heat insulating member and an outer heat insulating member formed independently of the inner heat insulating member. The outer heat insulating member contains a finely-powdered compressed silica material, and at least an outer surface thereof is covered with an anti-scattering member configured to prevent the finely-powdered compressed silica material from being scattered.