Extracts cooling infrastructure from the bell structure to resolve volume constraints, enabling compact transportable equipment for small metal batches.
Insulation channels enable fluidic flow to accelerate heater cooling, resolving slow ramp-down bottlenecks in semiconductor furnaces.
A substrate heating apparatus uses a vacuum insulating layer in the top plate to maintain temperature uniformity across the processing surface.
Angled annular surfaces and strategic openings distribute microwave energy uniformly, resolving throughput bottlenecks in batch curing processes.
An asymmetric gas supply pipe resolves uneven film thickness by extending gas residence time and ensuring uniform distribution across multiple wafers.
A surface hardening device adjusts ammonia gas flow to control nitriding potential while keeping decomposition gas constant.
Nested chamber design reduces heat loss and improves storage efficiency, enabling rapid temperature rises and high-quality organic film formation.
Thermal sublimation removes refractory metal cores without acid damage, preserving internal surface integrity and reducing hazardous waste.
Upper and lower exhaust passages with a porous member ensure uniform gas discharge, preventing raw material leakage in vacuum heat treatment.
A multi-zone heater calculates zone temperature from measured current and voltage to enable precise thermal adjustment.
Segmented heat reflectors adjust angles to balance peripheral and central heating, resolving non-uniform temperature distribution across the substrate.
A cooling plate moves between positions to transfer heat through integrated heat pipes and a fin structure.
A Ni-based alloy retort suppresses iron and chromium impurity incorporation during cathode active material firing, extending kiln lifespan.
A hot isostatic pressing device uses a cooling promotion unit within the high-pressure container base to exchange heat with pressure-medium gas.
Nitrogen inert atmosphere during shell mold sintering prevents decarbonization and molten steel spattering, eliminating casting defects like sand holes.