Lamp Heat Absorption Member for Substrate Processing
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Solution Overview
Problem
Conventional lamp heating mechanisms in substrate processing apparatuses reduce the lifespan of the lamp due to heat absorption by the sealing part, leading to premature failure.
Innovation Solution
A substrate processing apparatus with a heat absorption member made of a material with higher thermal conductivity than the sealing part, which covers the sealing part and is in contact with it, along with a base member and external electrical wire to manage heat and prevent light irradiation, thereby extending the lamp's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a conventional lamp heating mechanism is used to heat the substrate, then the substrate can be heated to the desired temperature, but the sealing part of the lamp absorbs heat and light energy causing reduced lamp lifespan
Solution Approach 1:
A heat absorption member is introduced as an intermediary component between the lamp and the substrate. This member selectively absorbs heat and light energy that would otherwise be absorbed by the lamp's sealing part, thereby protecting the lamp while still enabling substrate heating through conducted heat transfer.
Solution Approach 2:
The heat absorption member converts the harmful heat and light energy that would damage the lamp into a beneficial heating source for the substrate. By absorbing this energy and conducting it to the substrate, the system transforms potential lamp degradation into effective substrate heating.
2Power
If the sealing part is exposed to light and heat from the lamp, then the lamp can function, but the sealing part temperature increases reducing reliability
Solution Approach 1:
The heat absorption member serves as a mediator that intercepts heat and light energy from the lamp before it reaches the sealing part. This intermediary component protects the sealing part from thermal damage while allowing the lamp to operate at full power for substrate heating.
Solution Approach 2:
The harmful thermal energy is extracted from the path between the lamp and sealing part by introducing the heat absorption member. This extraction prevents the sealing part from being exposed to damaging temperatures while maintaining lamp functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses the increase in temperature of the sealing part, extending the lamp's lifespan and reducing maintenance time by efficiently managing heat and preventing light-induced damage.
Implementation Method 1
a heat absorption member including a material having a thermal conductivity higher than that of the sealing part to cover the sealing part with the sealing part being in contact
Implementation Method 2
a lamp including a lamp electrical wire, and a sealing part accommodating the lamp electrical wire therein to hermetically seal the lamp with a gas therein, the lamp being configured to irradiate the substrate supported by the substrate support unit with a light
Data Source
AI summary
A substrate processing apparatus capable of increasing the life span of a lamp for heating a substrate is provided. The substrate processing apparatus includes: a light receiving chamber for processing a substrate; a substrate support unit inside the light receiving chamber; a lamp including an electrical wire, and a seal accommodating the electrical wire to hermetically seal the lamp with a gas therein, the lamp irradiating the substrate with a light; a lamp receiving unit outside the light receiving chamber to accommodate the lamp therein, the lamp receiving unit including a lamp connector connected to the lamp to supply an electric current through the electrical wire, a heat absorption member including a material having a thermal conductivity higher than that of the seal, and a base member fixing the heat absorption member; and an external electrical wire connected to the lamp connector to supply current to the lamp connector.