Tunnel Junction Width Reduction via Polarization Dipole in GaN

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Solution Overview

Problem

Forming low resistance tunnel junctions in wide band gap materials, such as gallium nitride, is challenging due to the large band gap and limited dopant solubility, which results in a wider tunnel width and higher tunneling resistance.

Innovation Solution

The use of a natural polarization dipole in polar semiconductor materials, achieved by growing layers with different compositions, such as indium gallium nitride or aluminum gallium nitride, between degenerately doped gallium nitride layers, reduces the tunnel junction width by aligning the conduction and valence bands and introducing impurity-generated band gap states to lower the tunneling resistance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If degenerately doped p-n homojunction is used to form tunnel diode, then tunneling current can be achieved, but in wide band gap materials the large band gap results in larger tunnel width and higher tunneling resistance

Engineering Contradiction:
Improvetunneling resistanceVSAvoidtunnel width
Core Design Contradiction:
ReliabilityVSLength of stationary object

Solution Approach 1:

An intermediate layer with different composition (e.g., AlGaN or InGaN) is inserted between the p-type and n-type GaN layers. This intermediate layer acts as a mediator that modifies the band structure and creates a polarization dipole, enabling effective tunneling despite the wide band gap of GaN. The intermediate layer bridges the gap between the heavily doped regions, allowing carrier tunneling while maintaining material compatibility.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The composition of the intermediate layer is optimized to achieve the desired polarization effect. By adjusting the aluminum or indium content in the AlGaN or InGaN layer, the polarization dipole strength is tuned to reduce the effective tunnel width. Additionally, the doping concentrations in the p-type and n-type GaN layers are optimized to achieve degenerate doping levels that maximize tunneling probability.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If dopant concentration is increased to reduce tunnel width, then tunneling resistance decreases, but dopant solubility limit is reached and dopant ionization probability decreases

Engineering Contradiction:
Improvetunneling resistanceVSAvoiddopant concentration
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The intermediate layer with different composition serves as a mediator that enables effective tunneling without requiring extremely high dopant concentrations. The polarization dipole created by the composition gradient in the intermediate layer provides the necessary band alignment, allowing tunneling to occur at dopant levels below the saturation solubility limit.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The doping strategy employs local quality optimization by having different dopant concentrations in different regions. The p-type and n-type GaN layers are degenerately doped to maximize carrier density, while the intermediate layer has a composition gradient that creates the polarization effect. This localized doping approach allows each region to be optimized for its specific function without being constrained by global dopant solubility limits.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces the tunnel junction width and tunneling resistance, enhancing tunneling probability and current-voltage characteristics, making it feasible to fabricate low resistance tunnel junctions in wide band gap materials.

Implementation Method 1

A natural dipole associated with the junction's dissimilar materials aligns a conduction band to a valence band so that the tunnel junction width is smaller than it would be without the third layer

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

Esaki explained this characteristic as being the result of quantum tunneling across the depletion region. Under slight bias, charge carriers tunneling across the depletion region of what would be an impenetrable p-n junction at that bias without the quantum tunneling

Methodology Applied
Scientific EffectQuantum tunneling:

Implementation Method 3

When n- and p-type semiconductors are brought into contact to form a junction, electrons and holes diffuse from areas of high concentration towards areas of low concentration

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS8124957B2Low resistance tunnel junctions in wide band gap materials and method of making same
Publication Date: 2012.02.28 MACOM TECH SOLUTIONS HLDG INC
  • US8124957B2 patent drawing
  • US8124957B2 patent drawing
  • US8124957B2 patent drawing

AI summary

A low resistance tunnel junction that uses a natural polarization dipole associated with dissimilar materials to align a conduction band to a valence band is disclosed. Aligning the conduction band to the valence band of the junction encourages tunneling across the junction. The tunneling is encouraged, because the dipole space charge bends the energy bands, and shortens a tunnel junction width charge carriers must traverse to tunnel across the junction. Placing impurities within or near the tunnel junction that may form deep states in the junction may also encourage tunneling in a tunnel junction. These states shorten the distance charge carriers must traverse across the tunnel junction.