Galvanic Isolation in Pin-Lifter for Substrate Handling
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Solution Overview
Problem
Pin lifting devices in vacuum chamber systems face challenges such as mechanical stress on substrates due to frequent contact and potential differences that can lead to interference with processing equipment, resulting in substrate breakage and reduced processing stability.
Innovation Solution
A pin lifting device with a coupling part and a drive unit that provides controlled movement of support pins, featuring galvanic isolation between the drive and coupling parts to prevent electrical interference and mechanical stress, ensuring precise and gentle substrate handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If support pins are used to contact and support the substrate for precise positioning, then positioning accuracy is improved, but mechanical stress on the substrate increases leading to breakage
Solution Approach 1:
The patent introduces an intermediary mechanism between the drive unit and support pins that enables controlled, gentle movement. The coupling part with controlled adjustability acts as a mediator that reduces impact forces while maintaining positioning precision, solving the contradiction between accurate positioning and mechanical stress reduction.
Solution Approach 2:
The support pin system is made dynamically adjustable through the coupling part that can be positioned between extended and retracted states. This dynamic capability allows the system to adapt its support characteristics, providing precise positioning when needed while minimizing mechanical stress during substrate handling operations.
2Ease of operation
If the drive unit is electrically connected to the coupling part for controlled movement, then movement control is improved, but electrical interference with processing equipment occurs
Solution Approach 1:
The patent extracts the electrical drive components from the vacuum chamber environment by positioning the drive unit outside the chamber while maintaining mechanical connection through the coupling part. This separation removes the source of electrical interference from the sensitive processing environment while preserving movement control capability.
Solution Approach 2:
The coupling part serves as an intermediary that transmits mechanical motion from the externally located drive unit to the support pins without requiring direct electrical connections inside the vacuum chamber. This intermediary mechanism eliminates electrical interference pathways while maintaining controlled movement functionality.
3Measurement precision
If frequent contact between support pins and substrate is made for positioning, then positioning accuracy is maintained, but substrate breakage increases due to repeated mechanical stress
Solution Approach 1:
The system employs dynamic control where the coupling part can adjust between extended and retracted positions, allowing the support pins to make gentle contact for positioning while minimizing repeated mechanical impacts. This dynamic adjustment maintains positioning accuracy without compromising substrate integrity through excessive contact forces.
Solution Approach 2:
The coupling mechanism incorporates cushioning characteristics that absorb and dampen impact forces before they reach the substrate. This beforehand cushioning protects the substrate from breakage during frequent positioning operations while maintaining the necessary positioning accuracy through controlled support.
Data Source
AI summary
A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.