GaN HEMT Gate Bridge Structure for Normally-Off Operation

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Solution Overview

Problem

Silicon-based power devices face limitations in efficiency due to properties and manufacturing processes, and high electron mobility transistors (HEMTs) with III-V compound semiconductors struggle with achieving normally-off characteristics and reduced threshold voltage dispersion.

Innovation Solution

The design of HEMTs includes a channel supply layer generating a two-dimensional electron gas, depletion forming units, and a gate electrode configuration with bridges and contact portions to form a depletion region, allowing for normally-off operation and reduced threshold voltage dispersion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a HEMT uses a heterojunction structure of compound semiconductor to achieve high electron mobility and high breakdown voltage, then electron mobility and breakdown voltage are improved, but it is difficult to achieve normally-off characteristics and threshold voltage control is poor

Engineering Contradiction:
Improveelectron mobility and breakdown voltageVSAvoidnormally-off characteristics and threshold voltage control
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The gate structure is segmented into multiple components: gate electrode, bridge, and contact portion. The bridge connects the gate electrode to the channel supply layer while the contact portion extends under the source electrode, creating distinct functional zones that enable independent control of depletion regions and threshold voltage

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the gate structure have different functions: the gate electrode controls the channel, the bridge provides electrical connection, and the contact portion under the source electrode creates a localized depletion region. This local differentiation allows the HEMT to achieve normally-off characteristics while maintaining high electron mobility in the channel region

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If silicon-based power devices are used for power control, then manufacturing is easier, but efficiency cannot be increased due to silicon property limitations

Engineering Contradiction:
Improvemanufacturing easeVSAvoidpower device efficiency
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The HEMT uses a composite structure combining GaN layer (channel layer) and AlGaN layer (channel supply layer) to form a heterojunction. This composite material structure exploits the superior electron mobility and breakdown voltage properties of III-V compound semiconductors, achieving high efficiency power control that overcomes silicon's inherent limitations

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the HEMTs' electron mobility and breakdown voltage, achieving stable high-frequency and high-power performance with improved threshold voltage control.

Implementation Method 1

The channel supply layer configured to generate a two-dimensional electron gas (2DEG) in the channel layer

Methodology Applied
Scientific EffectTwo-dimensional electron gas (2DEG):

Implementation Method 2

the depletion forming unit configured to form a depletion region in the 2DEG

Methodology Applied
Scientific EffectDepletion region:

Data Source

PatentUS9252255B2High electron mobility transistor and method of manufacturing the same
Publication Date: 2016.02.02 SAMSUNG ELECTRONICS CO LTD

AI summary

Provided are a high electron mobility transistor (HEMT) and a method of manufacturing the HEMT. The HEMT includes: a channel layer comprising a first semiconductor material; a channel supply layer comprising a second semiconductor material and generating two-dimensional electron gas (2DEG) in the channel layer; a source electrode and a drain electrode separated from each other in the channel supply layer; at least one depletion forming unit that is formed on the channel supply layer and forms a depletion region in the 2DEG; at least one gate electrode that is formed on the at least one depletion forming unit; at least one bridge that connects the at least one depletion forming unit and the source electrode; and a contact portion that extends from the at least one bridge under the source electrode.